Femtosecond laser glass welding device and method

Abstract

The invention discloses a femtosecond laser glass welding device and method. The method comprises the following steps of 1) dropwise adding a small amount of liquid on one piece of glass, then stacking another piece of glass, enabling the liquid to fill a gap of the to-be-welded glass, and enabling the gap to be reduced under the action of atmospheric pressure, 2) focusing a femtosecond laser beam with relatively high monopulse energy on the contact surface of the two pieces of glass to be welded, and scanning the laser focus at a high speed along a closed path by utilizing a scanning galvanometer to form a semitransparent welding seam at the contact part of the two pieces of glass, and (3) finally, using a femtosecond laser beam with low monopulse energy for low-speed scanning along the semitransparent weld joint, and achieving firmer welding finally. Through the first high-speed scanning, a glass gap can be uniformly reduced, and buckling deformation of two pieces of naturally stacked glass in a welding process is avoided; and a semitransparent microstructure can be pre-formed on the contact interface, so that light absorption during second scanning is enhanced, and the volume of a molten pool is enlarged. The femtosecond laser can be used for achieving sealing welding of glass with large gaps, and the method has the advantages of being high in welding speed, high in welding strength, stable and reliable in process and wide in application range.

Description

technical field [0001] The invention belongs to laser welding, and relates to a device and method for femtosecond laser welding glass. Background technique [0002] Because of its good physical and chemical properties, such as good light transmission, high transparency, high hardness, corrosion resistance, etc., glass materials are indispensable and excellent materials in production, life and scientific research. In scenarios such as device packaging and optical device combination, it is often necessary to connect glass materials, and there are high requirements for the strength and sealing of the connecting wires. [0003] If two or more pieces of glass materials need to be connected during the application process, the methods of adding solder welding, gluing and high-temperature heating and welding are commonly used at present. Welding glass by adding solder has poor chemical stability due to the difference between the solder and the base material. If the glued connectio...

AI Technical Summary

Problems solved by technology

[0006] (1) Due to the small focus of the microscopic objective lens used, the focus alignment accuracy is very high, so the two surfaces are required to be in optical contact, and usually need to be fixed by a fixture, which is difficult to meet the requirements in actual production;

[0007] (2) When welding with a microscope objective lens, a displacement platform is used for movement. Due to the limitation of the displacement platform, the welding speed is slow and the efficiency is low, which is not suitable for production applications;

[0008] (3) The focal length of the objective lens is small, the thickness of the welding material is greatly limited, and it is impossible to weld thicker materials, which greatly limits the application range of laser welding

However, the above method still has the following problems in large-area welding: the welding points formed by oscillation scanning are discontinuous, additional continuous welding is required to achieve sealing, the overall welding area is relatively large, and it is difficult to complete welding when the weldable area is very limited

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