Ionization type gas sensor and preparation method thereof

A gas sensor and ionization technology, applied in instruments, scientific instruments, and material analysis through electromagnetic means, can solve the problems of high-density current oxidation and degradation of carbon nanotubes
CN113390952AActive Publication Date: 2021-09-14SHANGHAI AEROSPACE SCI & IND ELECTRIC APPLIANCE RES INST +3
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI AEROSPACE SCI & IND ELECTRIC APPLIANCE RES INST
Publication Date
2021-09-14

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Abstract

The invention discloses an ionization type gas sensor which comprises a first electrode plate and a second electrode plate, a layer of conductive metal film is sputtered on one surface, far away from the second electrode plate, of the first electrode plate, and an electrode array is arranged on one surface, facing the second electrode plate, of the first electrode plate. The gas sensor is characterized in that at least one layer of metal film is arranged on the upper surface of the electrode array, a metal oxide nanowire is arranged on the upper surface of the metal film, an electrode film is sputtered on one surface, facing the first electrode plate, of the second electrode plate, and the distance between the first electrode plate and the second electrode plate is 20-400 microns. The gas sensor is simple in preparation process, good in stability, low in breakdown voltage and suitable for commercial production.
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Description

technical field

[0001] The invention relates to the technical field of nano-device preparation, in particular to a low breakdown voltage ionization gas sensor based on copper oxide nanowires and a preparation method. Background technique

[0002] Adsorption gas sensors usually work on the principle of measuring the change in the electrical response of the sensing device when gas molecules are adsorbed on the surface of a sensitive material. Since the adsorption of different gases may elicit similar electrical responses, chemisorption gas sensors often suffer from the difficulty of measuring selectivity. On the other hand, adsorption-type gas sensors have greater difficulty in detecting gases with low adsorption energy, such as noble gases. In addition, some adsorption gas sensors work at higher temperatures.

[0003] In order to overcome many problems of conventional chemical adsorption gas sensors, it is a good choice to introduce physical ionization gas sensors. Since m...

Claims

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