Device and method for high-precision surface polishing through laser

Abstract

The invention provides a device and a method for high-precision surface polishing through laser. The device comprises a laser device, a beam expander, a galvanometer and a field lens; the laser device emits laser; the beam expander is arranged at a light outlet of the laser device and is used for changing a divergence angle of laser emitted by the laser device to obtain a collimated laser beam; the galvanometer is arranged at a light outlet of the beam expander and is used for adjusting the irradiation position of the collimated laser beam, so that the irradiation position is aligned to the wave crest of knife ripples of a workpiece; the field lens is arranged at a light outlet of the galvanometer and used for achieving light beam focusing and obtaining high-power-density light spots symmetrical to the knife ripples in size; and the high-power-density light spots are aligned to the wave crest position of knife ripples of the workpiece, and the knife ripple wave crest is melted, so that high-precision polishing is conducted on the surface of the workpiece. After the workpiece is turned by a machine tool, the workpiece is directly polished by laser processing equipment so as to remove the knife ripples, so that the automation and integration of processing are realized. Through the method, the knife ripples can be removed with great efficiency, and the material surface roughness is reduced.

Description

technical field [0001] The invention belongs to the technical field of laser polishing, and more specifically relates to a device and method for high-precision surface polishing using laser. Background technique [0002] Monocrystalline silicon is an important optical material. Ultra-smooth silicon-based mirrors are widely used in advanced optical systems such as space imaging detection, weapon optical guidance, and major scientific and technological infrastructure. The surface roughness and subsurface damage of the mirror determine the imaging quality and service life of the optical system. If the manufacturing technology of such an ultra-smooth surface cannot be broken through, it will seriously restrict the development of my country in the above-mentioned advanced optical field. Although the single-point diamond cutting technology can obtain better surface roughness and ideal surface accuracy, the principle of cutting will inevitably lead to knife lines on the surface of ...

AI Technical Summary

Problems solved by technology

[0004]Aiming at the defects of the prior art, the object of the present invention is to provide a device and method for high-precision surface polishing using laser, aiming to solve the existing problem of removing knife lines The method is complex in operation, poor in automation level, has potential safety hazards and pollutes the environment

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