Linear array type pyroelectric infrared detector with heat insulation structure

A pyroelectric infrared and detector technology, applied in electrical radiation detectors, instruments, measuring devices, etc., can solve the problems of limited application range, high cost, and complex device structure of refrigeration detectors, and achieve improved thermal performance and The effect of outputting signal current, improving electrical conductivity, and low thermal conductivity

Pending Publication Date: 2021-10-15
成都优蕊光电科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Cooled infrared detectors generally belong to optoelectronic devices, which have many advantages, such as high sensitivity, fast response, strong detection ability, etc., but the detector must work at a lower temperature, and the detection rate at room temperature is significantly lower than that at low temperature. The detection rate is high, and additional cooling equipment and cryogenic containers are required, resulting in complex structure and high cost of the device, so the application range of cooling detectors is limited

Method used

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  • Linear array type pyroelectric infrared detector with heat insulation structure
  • Linear array type pyroelectric infrared detector with heat insulation structure
  • Linear array type pyroelectric infrared detector with heat insulation structure

Examples

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Embodiment 1

[0029] Such as figure 2 The pyroelectric infrared array device shown has excellent thermal and mechanical properties, and has a high specific detection rate. It can be used not only in military fields such as aerospace, but also in civilian fields such as security monitoring. It includes one or more An infrared photosensitive element 1, a heat insulation structure and a PCB board 5 carrying line devices.

[0030] Such as figure 2 The infrared array device shown is a 4-element array, and it only needs to lengthen the size of the ceramic insulation structure, and it can better carry 8-element array or 16-element array sensitive elements; the front and back surfaces of the infrared device have electrodes, for The shape of the upper electrode of the device is not restricted, but the upper electrode needs a contact hole capable of wire bonding, and the lower electrode needs to be able to contact the patterned metal electrode 2 on the heat insulation structure; the heat insulatio...

Embodiment 2

[0032] On the basis of Example 1, this example discloses an optimized process flow for the preparation of pyroelectric infrared sensor devices:

[0033] For the ceramic heat insulation structure, ceramics with a thickness of about 2 mm are selected for UV laser processing to etch a tunnel-shaped suspended structure with a depth of about 1 mm, such as image 3 As shown, the shape of the air gap 3 is trapezoidal, the length of the upper side is greater than the length of the lower side, and the length of the upper side is smaller than the width of the device. Then use a hard mask to vapor-deposit gold on the upper surface of the ceramic insulation structure to form a figure 1 the graph shown. Next, apply conductive silver glue to the circle on the patterned metal electrode 2, and align the prepared pyroelectric infrared device with upper and lower electrodes with the air gap 3 of the ceramic structure 4 and the circle of the patterned metal electrode 2. At the contact point, a...

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Abstract

The invention provides a linear array type pyroelectric infrared detector with a heat insulation structure. The detector comprises an infrared light sensitive element, a ceramic structural member and a PCB, the ceramic structural member is arranged on the top surface of the PCB, the infrared light sensitive element is arranged on the top surface of the ceramic structural member, an air gap exists between the infrared light sensitive element and the ceramic structural member, the air gap is of a tunnel type structure, and the transverse size of the top of the tunnel type structure is larger than the transverse size of the bottom of the tunnel type structure. By adopting the design of the ceramic heat insulation structure, the metalized pattern electrode and the tunnel type air gap structure, good thermal performance, good conductivity and good mechanical strength of the linear array type pyroelectric infrared detector are considered, and compromise and balance of various performances of the infrared column device are realized.

Description

technical field [0001] The invention relates to the field of device structures, in particular to a linear pyroelectric infrared detector with a thermal insulation structure. Background technique [0002] Infrared detector is the core of infrared detection technology. Since the 1970s, military needs have promoted the research and development of infrared detectors. Currently in the military field, it is widely used in the collection of night intelligence, all-weather observation and surveillance of the battlefield, night observation of various weapon systems and fire control systems, night driving aimed at armored vehicles, tanks, ships, helicopters, missiles Infrared guidance and space satellite telemetry, etc. In the civilian field, it is also widely used in the fields of industry, medicine, agriculture, forestry, fire protection, search and rescue, and environmental protection. [0003] According to the working principle of different sensitive materials, infrared detecto...

Claims

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Application Information

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IPC IPC(8): G01J5/28G01J5/30
CPCG01J5/28G01J5/30G01J2005/286
Inventor 赵泽彬赵越赖正刚曾祥全
Owner 成都优蕊光电科技有限公司
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