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A graphene plasmonic gas sensor and manufacturing method thereof

A technology of gas sensor and plasmon, applied in the field of plasmon gas sensor and its production, can solve the problems of low sensor sensitivity, low electrical response and Raman response, etc., to improve electrical response, improve Raman response, The effect of improving sensitivity

Active Publication Date: 2022-06-21
LINGNAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This patent only uses the graphene layer as the sensitive area of ​​the gas, but the electrical response and Raman response of the graphene layer to the gas are low, resulting in low sensitivity of the sensor

Method used

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  • A graphene plasmonic gas sensor and manufacturing method thereof
  • A graphene plasmonic gas sensor and manufacturing method thereof
  • A graphene plasmonic gas sensor and manufacturing method thereof

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Effect test

Embodiment 1

[0030] like figure 1 and figure 2 As shown, a graphene plasmonic gas sensor according to a preferred embodiment of the present invention includes a substrate 1, a graphene layer 2 and a noble metal particle layer 3, and the substrate 1, the graphene layer 2 and the noble metal particle layer 3 are in order from bottom to top It is provided that the noble metal particle layer 3 includes a plurality of noble metal particles 301 , and the noble metal particles 301 are located above the graphene layer 2 . In this embodiment, the graphene layer 2 and the noble metal particle layer 3 are sequentially arranged on the substrate 1 from bottom to top, so that the noble metal particles 301 can generate a surface-enhanced Raman (SERS) effect, thereby enhancing the interaction between graphene plasmons and gas molecules , to improve the Raman response of the graphene layer 2 to the gas, thereby obtaining a plasmon-enhanced Raman spectrum and improving the sensitivity of the sensor to gas...

Embodiment 2

[0037] like Figure 4 As shown, the difference between this embodiment and the first embodiment is that the periodic nanostructure can also be a grid pattern, the grooves 201 are rectangular, and the plurality of grooves 201 are distributed in a rectangular array. After covering a graphene layer 2 on the substrate 1, it is etched away Figure 4 The rectangular part in the middle is formed with grooves 201, and a plurality of grooves 201 form periodic nanostructures. Other structures of this embodiment are the same as those of the first embodiment, and are not repeated here.

Embodiment 3

[0039] like Figure 5 As shown, this embodiment also provides a method for manufacturing a graphene plasmonic gas sensor, which includes the following steps:

[0040] Step S1, preparing a graphene layer on the upper surface of the substrate;

[0041] Step S2, depositing a precious metal layer on the graphene layer;

[0042] Step S3, preparing the noble metal particles of the noble metal layer into noble metal nanoparticles,

[0043] In step S1, a graphene film is first grown on a copper substrate by a CVD (chemical vapor deposition) method, and then the graphene film is transferred to SiO with a certain thickness 2 layer on the silicon substrate to form a graphene layer, which can be formed on SiO as needed 2 Layers arrange multiple graphene films from bottom to top. The area of ​​graphene layer 2 is smaller than that of SiO 2 layer area so that the SiO 2 The layers have portions not covered by the graphene layer 2 . Then, by etching, the SiO 2 The part of the layer no...

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Abstract

The invention relates to the technical field of gas detection, and discloses a graphene plasmonic gas sensor, which includes a substrate, a graphene layer and a noble metal particle layer, the substrate, the graphene layer and the noble metal particle layer are sequentially arranged from bottom to top, and the noble metal particle The layer includes a plurality of noble metal particles, and the noble metal particles are located above the graphene layer. The noble metal particles can undergo surface-enhanced Raman (SERS) effect, enhance the interaction between graphene plasmons and gas molecules, and improve the graphene layer’s resistance to gas. Raman response, so as to obtain plasmon-enhanced Raman spectrum, and the noble metal particles can also improve the electrical response of the graphene layer to the gas, greatly improving the sensitivity of the sensor. In addition, the graphene layer of the present invention has a periodic nanostructure, and TiO is provided between the graphene layer and the noble metal particle layer. 2 The dielectric layer, the base includes a silicon substrate and the SiO disposed on the silicon substrate 2 Floor. The present invention also provides a method for manufacturing the graphene plasmonic gas sensor.

Description

technical field [0001] The invention relates to the technical field of gas detection, in particular to a graphene plasmon gas sensor and a manufacturing method thereof. Background technique [0002] Label-free identification of gas molecules has important applications in the fields of semiconductor high-end chip manufacturing process monitoring, explosives detection, and medical diagnosis. The detection of gas by current devices and equipment is not directly related to the composition and structure of gas molecules, so it is difficult to accurately identify the type and concentration of gas molecules. Since Raman spectroscopy can reflect the interaction between incident light and the vibration or rotation of the molecule to be measured, it is considered to have the ability to identify matter fingerprints. Although the Raman scattering signal itself is very weak, surface-enhanced Raman scattering (SERS) can achieve single-molecule-level detection sensitivity, so it is applie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/65G01N27/12
CPCG01N21/658G01N27/127
Inventor 赵珉刘桂英陈伟军刘如军
Owner LINGNAN NORMAL UNIV
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