Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof

A pressure sensor, flexible and elastic technology, which is applied in the field of large area array high-sensitivity flexible and elastic pressure sensor and its preparation, can solve the problems of insufficient array area, insufficient stretchability and flexibility, etc., and achieves large array area, high sensitivity, The effect of expanding the area

Pending Publication Date: 2021-11-30
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The sensor of the present invention has high sensitivity and is easy to prepare, but has the disadvan

Method used

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  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof
  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof
  • Large-area-array high-sensitivity flexible elastic pressure sensor and preparation method thereof

Examples

Experimental program
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Example Embodiment

[0054] Example 1

[0055] See figure 1 , A composite layer structure diagram of a large-scale high-sensitive gelatable pressure sensor of the present invention. Specifically, the large-faced high-sensitive gelatable pressure sensor of the present embodiment includes a first force composite layer and a second force sensitive composite layer.

[0056] In this embodiment, the first force sensitive composite layer is the same as the second force sensitive composite layer structure, wherein the composite layer includes a substrate, a transition layer, a spacer layer, an electrode layer and a force sensitive layer, and the electrode layer is silver. electrode.

[0057] The force sensitivity layer includes a conformal graphene film, a micro-veneer coating, and a high resistance coating. The common-shaped graphene film is formed in the substrate and the electrode layer, and the microcapstraminated composite slurry is sprayed with low conductivity on the conformal graphene film. form. The ...

Example Embodiment

[0068] Example 2

[0069] In order to explain more clearly, a large-scale high-sensitive gelatable pressure sensor of the present invention and the preparation method, the following binding figure 2 with image 3 Detailed explanation. See image 3 For the preparation process flow diagram of the present invention, the preparation process of highly sensitive soft elastic sensors, specifically, including steps:

[0070] S11, the two leather is treated separately. In this example, a nitrogen low temperature plasma is treated with two artificial leather fabrics, and the film-forming uniformity of the aqueous force sensitive slurry and the silver slurry can be improved.

[0071] S12, the transition layer and the electrode layer are prepared by screen printing techniques on two leather. In the present embodiment, the transition layer is a serpentine polyurethane, and the electrode layer is a serpentine silver slurry electrode, and the serpentine structure can make the sensor have good stre...

Example Embodiment

[0078] Example 3

[0079] This example is a pressure imaging system obtained by using the preparation method obtained by the preparation method in the present invention, and is combined with the operation of the system's working principle and constructing the system. Figure 4 , Figure 5 , Image 6 Detailed explanation.

[0080] Figure 4 A crosstalk analysis diagram of the array circuit signal, as shown in the figure, adjacent unit devices present signal crosstalk problem. Figure 5 For the zero potential scanning method of the array circuit, the voltage is sequentially applied to each row through the row selector, and the remaining line voltage is zero, which greatly reduces the ranking signal crosstalk, and improves the speed of the data read.

[0081] Image 6 The low noise array acquisition circuit and a pressure imaging system operated in the present embodiment, as shown in the figure, the interlocking piezoelectric sensor array uses a ranks acquisition circuit, adjacent unit d...

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Abstract

The invention discloses a large-area-array high-sensitivity flexible elastic pressure sensor and a preparation method thereof. The pressure sensor comprises a composite layer, and the composite layer comprises a substrate, a transition layer, a spacing layer, an electrode layer and a force sensitive layer. The force sensitive layer comprises a conformal graphene film and a micro-nano multistage coating; the conformal graphene film is formed by spraying graphene microchip slurry on the substrate and the electrode layer for the first time; and the micro-nano multistage coating is formed by spraying low-conductivity composite slurry on the conformal graphene film for the second time. The preparation method comprises the following steps of firstly printing the transition layer on the substrate, then printing the electrode layer on the transition layer, preparing the spacing layer, then spraying graphene microchip slurry on the substrate and the electrode layer to obtain a conformal graphene film, and finally spraying low-conductivity composite slurry on the film to form the micro-nano multistage coating. The method has the beneficial effects that the sensitivity of the sensor is improved, the area of the array is increased, the micro integration of the array device is facilitated, and the sensor has good flexibility and stretchability.

Description

technical field [0001] The invention relates to the technical field of flexible pressure sensing, in particular to a large-area array high-sensitivity flexible elastic pressure sensor and a preparation method thereof. Background technique [0002] Flexible pressure sensors are widely used in intelligent manufacturing, intelligent medical care, education services and other fields. The rapid development of related fields puts forward an urgent demand for the sensing technology of high-performance flexible pressure sensors. High-precision flexible mechanical sensing technologies represented by robot tactile sensing, robot safety protection, wearable human health detection, and automotive intelligent sensing are booming and have huge market prospects. They have become an important indicator of a country's comprehensive strength and international competitiveness. . However, my country relies heavily on imports of high-end flexible pressure sensing array devices, which are liste...

Claims

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Application Information

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IPC IPC(8): G01L1/20G01L9/02
CPCG01L1/20G01L9/02
Inventor 杨俊
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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