Flexible surface acoustic wave biosensor based on nucleic acid aptamer and manufacturing method thereof

Abstract

The invention discloses a flexible surface acoustic wave biosensor based on a nucleic acid aptamer and a manufacturing method thereof. The flexible surface acoustic wave biosensor comprises a polyimide flexible substrate, a layer of zinc oxide piezoelectric film is sputtered on the polyimide flexible substrate, a pair of interdigital transducers is evaporated on the zinc oxide piezoelectric film, an interdigital resonator is evaporated in the middle area of the pair of interdigital transducers, a layer of silicon dioxide film is sputtered above the interdigital resonator, a single layer of graphene is attached to the silicon dioxide film, and then the nucleic acid aptamer is anchored on the surface of the graphene through chaining molecules containing an aromatic ring structure to complete biological functional modification; wherein the interdigital transducer at one end is used for exciting a surface acoustic wave, the interdigital transducer at the other end is used for receiving the surface acoustic wave, a small amount of liquid drops to be detected are located at the center position, the resonant frequency of the surface acoustic wave can correspondingly change along with the change of the concentration of biological target molecules in the liquid to be detected, and detection of various biomarkers can be completed. The flexible surface acoustic wave has good biocompatibility.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a nucleic acid aptamer-based flexible surface acoustic wave biosensor and a manufacturing method thereof. Background technique [0002] With the continuous development of micro-nano manufacturing technology and flexible electronic technology, people have higher and higher requirements for the miniaturization, rapidity, integration and economy of biosensors used to detect various biomarkers. Bulk surface acoustic wave biosensors can detect a variety of biomarkers. Existing surface acoustic wave biosensors mainly detect changes in the concentration of biomarkers in the droplet to be tested by monitoring the change of resonance frequency. However, traditional biosensors are mainly based on rigid substrates, which cannot cope with non-invasive sampling detection based on sweat, tears, and saliva. [0003] Therefore, how to invent a flexible biosensor wit...

AI Technical Summary

Problems solved by technology

However, traditional biosensors are mainly based on rigid substrates and cannot cope with non-invasive sampling detection based on sweat, tears, and saliva

[0003] Therefore, how to invent a flexible biosensor with good compliance and fit to the skin surface is an extremely important issue. The existing flexible surface acoustic wave technology can realize physical sensors, but there are few biosensors that combine nucleic acid aptamers and graphene. biological sensor

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