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Dual-wavelength single-optical fiber chromatic dispersion confocal microscopic detection method and device

A dispersion confocal and detection method technology, applied in microscopes, optics, optical components, etc., can solve problems such as complex optical path adjustment, inability to further improve measurement efficiency, and complicated optical path adjustment process, achieving high signal-to-noise ratio and adapting to the surface of the object Effects of strong characteristic capability, improved sensitivity and measurement accuracy

Inactive Publication Date: 2022-01-07
绍兴钜光光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when constructing a confocal microscopic measurement system, the above method has the following disadvantages: First, the optical path adjustment process of the conjugate of a single point detector and a point light source is relatively complicated, and the design of the double point detector in the above method will make the optical path adjustment more complex. Complicated; secondly, the displacement offset of the two point detectors along the optical axis of the measuring beam needs to be controlled in the order of microns, which puts forward extremely high requirements for the machining accuracy of mechanical assemblies
However, the spectral acquisition frequency of commonly used spectral detection equipment can only reach about 100 kHz, which cannot further improve its measurement efficiency

Method used

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  • Dual-wavelength single-optical fiber chromatic dispersion confocal microscopic detection method and device
  • Dual-wavelength single-optical fiber chromatic dispersion confocal microscopic detection method and device
  • Dual-wavelength single-optical fiber chromatic dispersion confocal microscopic detection method and device

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Embodiment 1

[0027] Such as image 3 As shown, the schematic diagram of the spectrometer-based dual-wavelength single-fiber dispersion confocal microscopic detection device used in this embodiment includes a dual-wavelength light source 1 (including a first single-wavelength optical fiber light source 101, a second single-wavelength optical fiber light source 102, 1× 2 Fiber combiner 103), fiber coupler 2 (including illumination end fiber 201, coupling unit 202, common end fiber 203, detection end fiber 204), dispersive objective lens 3 (including achromatic lens 301, concave lens 302, first convex lens 303, second convex lens 304, third convex lens 305), wavelength splitting device 5 (including spherical reflector 501, grating 502, spherical focusing mirror 503), detector 6 (including lambda 1 and lambda 2 Intensity detection area), microprocessor 7. Among them, the dual-wavelength light source 1 emits wavelength lambda 1 and lambda 2 The illuminating light beam enters the fiber c...

Embodiment 2

[0031] The difference from Example 1 is that the acquisition of the displacement information of the measurement beam direction in this example depends on the construction of the dual-wavelength differential single-fiber dispersion confocal response value iGO 21 Calibration relationship with the displacement of the measured sample. In the device of the present invention, devices such as the fiber coupler 2, the dispersive objective lens 3, the wavelength splitting device 5, and the detector 6 all have non-uniform spectral response characteristics, so that the dual-wavelength differential single-fiber dispersion confocal response value iGO 21 The relationship between the measured sample displacement and the measured sample will deviate from the theoretical design, so it is necessary to accurately construct the dual-wavelength differential single-fiber dispersion confocal response value through actual testing iGO 21 Calibration relationship with the displacement of the meas...

Embodiment 3

[0033] Different from Embodiment 1, the wavelength splitting device 5 in this embodiment is composed of a collimating mirror 504 and a dichroic beam splitting mirror 505, such as Figure 7 shown. Its working principle is as follows: First, the collimating mirror 504 collimates the measurement beam emitted by the detection end fiber 204, and sends it into the dichroic beam splitter 505; the dichroic beam splitter 505 converts the wavelength lambda 1 and lambda 2 The light beams are separated and sent to the first photodetector 601 and the second photodetector 602 respectively; finally, the detector 6 (including the first photodetector 601 and the second photodetector 602) obtains the illumination wavelength lambda 1 and lambda 2 The single-fiber dispersion confocal response intensity value under I 1 and I 2 .

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Abstract

The invention belongs to the field of optical imaging and detection, and can be used for rapidly measuring the surface topography of a micro-nano precise sample. Chromatic dispersion confocal and dual-wavelength illumination is utilized, point light source illumination is provided through a common end optical fiber, a measurement light beam reflected by a sample is filtered, light with different wavelengths in the measurement light beam is separated by using a wavelength light splitting device, and single-optical-fiber dispersion confocal response intensity values under two illumination wavelengths are obtained; and displacement information of the sample surface along the optical axis direction of the measurement light beam is obtained. The common end optical fiber is adopted as an illumination pinhole and a detection pinhole at the same time, complex confocal light path adjustment is not needed, and self-alignment confocal of the optical system is achieved; and meanwhile, in the signal processing process, a linear area with a large slope is used for replacing a vertex area with the slope being zero in traditional dispersion confocal, and the detection sensitivity and precision are remarkably improved. Therefore, a feasible way is provided for high-speed and high-precision measurement of the surface profile, morphology and the like of a micro-nano sample, and the method has important application prospects in the fields of chip manufacturing and the like.

Description

technical field [0001] The invention relates to a high-speed and high-precision dispersion confocal microscopic measurement method, which can be used for high-speed and high-precision measurement of surface topography of various micro-nano precision samples such as integrated circuits, MEMS devices, micromirror arrays, and microfluidic devices, and belongs to optical imaging and detection. technology field. Background technique [0002] The confocal microscope was invented by American Marvin Minsky in 1957. Its basic principle is to place the point light source, object, and point detector in a conjugate position with each other. It can meet the surface topography measurement of various micro-nano structures. However, in the process of realizing the axial tomography measurement of the traditional confocal microscope, it is necessary to control the moving device such as a motor or a piezoelectric ceramic to move the microscopic objective lens or the measured sample precisely ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00
CPCG02B21/0024G02B21/0032G02B21/008
Inventor 曲元杨佳苗陈成
Owner 绍兴钜光光电科技有限公司