Method for preparing gradient ceramic furnace tube coating from corrosion-resistant nickel-based powder

Abstract

The invention discloses a method for preparing a gradient ceramic furnace tube coating from corrosion-resistant nickel-based powder. The method comprises a new corrosion-resistant nickel-based powder composition ratio and steps of preparing the furnace tube coating: 1, selecting a furnace tube with specification and size meeting requirements; 2, conducting base surface treatment, specifically, subjecting the inner surface of the steel pipe to spraying rust removal and cleaning dirt removal, and using a cleaning agent and frosted particles for cleaning dirt removal; 3, cladding nickel-based alloy powder on a furnace tube by adopting a laser device, entering and exiting the furnace tube once to realize double-layer laser cladding, and completing laser cladding of a nickel-based corrosion-resistant furnace tube coating with the thickness range of 1.0-1.5 mm once; 4, carrying out cooling and polishing; and 5, cleaning residues in the furnace tube to prepare a finished product. According to the method, cracks caused by stress concentration are avoided by adding the low-melting-point metal into the nickel-based alloy, meanwhile, the smoothness of the surface of a base material is ensured through spraying rust removal and cleaning dirt removal, the stability of the laser cladding nickel-based coating is improved, and the characteristic performance of the nickel-based coating is indirectly enhanced.

Description

technical field [0001] The invention relates to the technical field of gradient ceramics, in particular to a method for preparing a gradient ceramic furnace tube coating from corrosion-resistant nickel-based powder. Background technique [0002] Diffusion furnace is one of the important process equipment in the pre-process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. The semiconductor process gas produced by the diffusion furnace is characterized by high temperature and corrosiveness. It is difficult for ordinary pipes to meet the process requirements. If the pipes are deformed by high temperature or leaked by process exhaust gas corrosion, serious accidents will be caused, resulting in major economic losses. . [0003] Since the birth of laser cladding technology, general...

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Problems solved by technology

[0004] At the same time, the existing laser cladding substrates are often polished by slicing. The grinding is not thorough, and the substrate surface remains grease. Under high temperature conditions, the grease will react with the nickel-based material or release gas, forming pores and causing cracks, which affects the coating. Layer characteristic performance

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