Foldable digital microfluidic devices using flexible electronic platforms and methods of making same
A technology of digital microfluidics and flexible substrates, which is applied in the direction of microelectronic microstructure devices, fluid controllers, microstructure devices, etc., can solve the problems of dielectric uniformity and surface flatness, droplet driving reliability reduction, droplet Problems such as limited transmission speed, to achieve the effects of simplified manufacturing, low electrowetting voltage, and good performance
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[0026] figure 1 A side view of an example of a digital microfluidic structure 100 on which the foldable digital microfluidic (DMF) device of the present disclosure is based is shown. In this example, the digital microfluidic structure 100 is a structure based on the use of blind vias. For example, the digital microfluidic structure 100 can be formed Figure 2 to Figure 9 The basis for a foldable digital microfluidic device 200 of the present disclosure is shown.
[0027] The digital microfluidic structure 100 may include a polyimide substrate 110 that may further include an arrangement of multiple droplet-operated electrodes 112 that may be formed using blind via techniques. For example, the plurality of droplet operations electrodes 112 may include an actuation electrode 114 on one side of the polyimide substrate 110 and an external electrode 116 on the other side of the polyimide substrate 110 . Each of the actuation electrodes 114 and the external electrodes 116 may then...
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