Preparation method of InP nanorod radial homojunction array structure and solar cell

Abstract

The invention discloses a preparation method of an indium phosphide nanorod radial homojunction array structure. The preparation method comprises the following steps: cleaning and blow-drying a p-type InP single crystal wafer; manufacturing a nanorod array on the surface of the p-type InP single crystal wafer, and cleaning the nanorod array with acid; and the side surface of the nanorod array is coated with an oxide layer and is plated with a transparent conductive layer. According to the method, in the preparation process, preparation of the indium phosphide nanorod array and the radial homojunction is achieved at the same time, the surface doping concentration and depth of indium phosphide are accurately controlled by controlling the etching time and the H2 content, and compared with other methods for growing the radial homojunction, the method is simple in equipment and high in preparation efficiency. The invention also provides a solar cell. The solar cell provided by the invention has relatively high sunlight absorptivity and conversion efficiency.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a preparation method of an InP nano-column radial homojunction array structure and a solar cell. Background technique [0002] With the development of the global economy and the growth of the population, the pollution caused by fossil fuels has become increasingly serious, and people have begun to explore alternatives to traditional energy sources. Solar energy is the most abundant and easily accessible renewable energy on the earth. A solar cell is a semiconductor device that directly uses solar energy to generate electricity through the photoelectric conversion effect. However, the low energy conversion efficiency and high cost of solar cells have become two major problems restricting its development. At present, silicon-based solar cells occupy a dominant position in solar cells, and the conversion efficiency of monocrystalline silicon cells can reach about...

AI Technical Summary

Problems solved by technology

However, in general, the preparation of radial junctions of nanopillars requires precise control of the doping concentration in a very small size (within 200nm), and it is easy to introduce additional surface defects. The efficiency of nanopillar solar cells is not very high.

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