Electronic acid waste liquid pretreatment module and electronic acid waste liquid recovery treatment method
A technology of waste liquid recovery and treatment method, applied in chemical instruments and methods, sulfur trioxide/sulfuric acid, inorganic chemistry, etc., can solve the problem of no recycling method for electronic acid waste liquid
Active Publication Date: 2022-05-03
TIANJIN BODA SULFURIC ACID IND
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Problems solved by technology
[0003] The applicant is a chemical enterprise specializing in the production of electronic acid and sulfuric acid with various contents. The electronic acid currently sold is mainly used for the etching of electronic chips, and electronic grade sulfuric acid is used for cleaning in the cleaning process. Reasonable recycling method, in order to improve the competitiveness of the company's products, the applicant recycles the sold and used electronic acid waste liquid to further improve the utilization rate of acid
Method used
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Embodiment 1
[0036] A method for recycling electronic acid waste liquid, comprising the steps of:
[0037] (1) The electronic acid waste liquid is transported to the factory by tank truck, and after passing the inspection, it is discharged to the waste acid pit.
[0038] Turn on the submerged centrifugal pump of the waste acid trough, and transport the electronic acid waste liquid from the top of the waste acid storage tank to the waste acid storage tank through the pipeline, so that the liquid level of the waste acid trough remains within a reasonable index range until the tank truck or ton barrel The electronic acid waste liquid in the tank has been discharged;
[0039] (2) Open the acid discharge valve at the bottom of the waste acid storage tank, so that the electronic acid waste liquid flows into the waste acid tank, and at the same time, turn on the submerged centrifugal pump of the waste acid tank, and recycle it to the battery sulfuric acid production module and tail gas through th...
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The invention relates to the field of electronic acid waste liquid treatment, and provides an electronic acid waste liquid recovery treatment method which comprises the following steps: respectively conveying pretreated electronic acid waste liquid to a circulating tank I filled with concentrated sulfuric acid at the bottom of a storage battery sulfuric acid absorption tower and a circulating tank II filled with dilute sulfuric acid at the bottom of a tail gas absorption tower; flue gas produced by a sulfuric acid device is introduced into a storage battery sulfuric acid absorption tower, acid liquor is in reverse contact with the flue gas, and sulfur trioxide reacts with water in concentrated sulfuric acid to generate sulfuric acid; after reaction in the steps, sulfur dioxide-containing tail gas is introduced into a tail gas absorption tower, and sulfur dioxide reacts with hydrogen peroxide in the electronic acid waste liquid in a filler layer II to generate sulfuric acid. The electronic acid waste liquid pretreatment module is applied to the electronic acid waste liquid recovery treatment method. Electronic acid waste liquid is pretreated by the pretreatment module and then supplies acid to the storage battery sulfuric acid absorption module and the tail gas absorption module; the device has the beneficial effects that sulfur trioxide and sulfur dioxide in the electronic acid waste liquid and the flue gas are recycled, and the concentration of sulfuric acid is improved.
Description
technical field [0001] The invention relates to the field of comprehensive treatment of electronic acid waste liquid and flue gas generated in the production process of sulfuric acid, in particular to a pretreatment module of electronic acid waste liquid and a recovery and treatment method for electronic acid waste liquid. Background technique [0002] Wet electronic chemicals--electronic grade sulfuric acid, also known as high-purity sulfuric acid and ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent. It is an indispensable key basic chemical reagent in the development of microelectronics technology. The assembly and processing of integrated circuits are also used in the cleaning, photolithography, corrosion of silicon wafers, corrosion and electroplating cleaning of printed circuit boards. [0003] The applicant is a chemical enterprise specializing in the production of electronic acid and sulfuric acid with various contents. The electronic acid currently...
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IPC IPC(8): C01B17/775C01B17/80C01B17/90
CPCC01B17/775C01B17/80C01B17/90Y02W30/84
Inventor 袁永和崔鹏慧
Owner TIANJIN BODA SULFURIC ACID IND