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Micropore laser processing method based on scanning path control

A laser processing method and scanning path technology, which are applied in the field of microhole laser processing based on scanning path control, can solve the problems of inability to meet the functional requirements of the surface structure of polymer materials, monotonous processing of micropores on the surface of templates, etc., and improve surface quality , enrich the shape and function, improve the effect of quality and efficiency

Pending Publication Date: 2022-05-27
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0004] The surface microstructure of polymer materials has broad application prospects in the fields of microelectronics, optical devices, and tissue engineering materials, but the current monotonous processing of micropores on the surface of templates cannot meet the functional requirements of rich surface structures of polymer materials.

Method used

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  • Micropore laser processing method based on scanning path control
  • Micropore laser processing method based on scanning path control
  • Micropore laser processing method based on scanning path control

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Embodiment 1

[0041] Taking the machining of tooth-shaped micro-taper holes as an example, the machining process of this method is described in detail.

[0042] like Figure 4 As shown, the toothed microcones have complex contour shapes, and the toothed surface can form a secondary structure, providing richer functionality for the polymer microprotrusion surface, and the change of the tapered section and angle can adjust the sensitivity of the functional response . The micro-hole machining of the tooth-shaped micro-cone transcription template is carried out according to the following steps:

[0043] Firstly, according to the shape characteristics and size of the tooth-shaped micro-cone, a 3D model of a single micro-pore feature is established. In order to ensure that the micro-protrusion structure is consistent with the design size after demolding, the micro-pore feature modeling follows the expansion of the corresponding polymer material during the transfer process. and contraction laws....

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Abstract

The invention belongs to the field of laser micromachining, and relates to a micropore laser machining method based on scanning path control, which comprises the following steps of: performing three-dimensional modeling on the micropore shape of a transfer template according to the requirement of a micro-bulge structure on the surface of a high polymer material; identifying coordinate information of a single micropore, and combining the coordinate information into the contour of the micropore; optimization is carried out according to the micropore shape contour curve, so that the micropore shape contour curve conforms to laser scanning; based on an algorithm, realizing layer division, a filling mode, scanning times and out-of-focus control planning; machining parameters are preliminarily determined, single-feature trial machining is conducted, and the machining parameters are adjusted till the single feature meets the precision; according to the surface micropore structure requirement of a high polymer material, micropores are arrayed, and repeated processing is carried out to form a transfer template. The method can realize high polymer material surface microstructure processing, the template surface micropore processing shape is abundant, and the functional requirement of abundant high polymer material surface structure can be met.

Description

technical field [0001] The invention belongs to the field of laser micro-processing, in particular to a micro-hole laser processing method based on scanning path control. Background technique [0002] The surface microstructure of polymer materials is closely related to the material properties, but its original surface exhibits chemical inertness, hydrophobicity, and low surface energy, which limits its application. The construction of the surface microstructure of organic polymer materials can improve the surface specificity, response sensitivity, surface wettability, etc. of the polymer, showing attractive application prospects in the field of microelectronics. [0003] Based on its own confinement and interaction with polymers, the template method can realize the control of the size, morphology and mechanism of the surface microstructure. Laser etching technology is the most widely used method in template method. Due to the characteristics of high monochromaticity, high ...

Claims

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Application Information

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IPC IPC(8): B23K26/082B23K26/382B23K26/0622
CPCB23K26/082B23K26/382B23K26/0624Y02P10/25
Inventor 荣佑民张国军黄禹陈兴华
Owner HUAZHONG UNIV OF SCI & TECH
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