Composite nano material array gas sensitive sensor and preparation method thereof

Abstract

The invention discloses a composite nanomaterial array gas sensitive sensor and a preparation method thereof, the composite nanomaterial array gas sensitive sensor comprises a porous silicon array, the porous silicon array comprises a silicon plate and a plurality of porous silicon wafers, the porous silicon wafers are parallel to one another, the bottom surfaces of the porous silicon wafers are fixed on the upper surface of the silicon plate, and the front and back surfaces of each porous silicon wafer are provided with a plurality of grooves; a chestnut-shell-shaped ZnO nano material is attached to the interior of each groove, and a WO3 nano material is attached to the chestnut-shell-shaped ZnO nano material; a silicon wafer is selected as a substrate material, the sensitivity to gas can be improved, and zinc oxide is used as a catalyst, so that the device is safer and more environment-friendly; the silicon wafer can be well cleaned by etching the silicon wafer with hydrofluoric acid, so that the silicon wafer is cleaner and smoother; the chestnut shell-shaped zinc oxide nano material is produced by using a hydrothermal method, so that the reaction time and the crystal generation condition can be conveniently and effectively controlled, and meanwhile, the obtained product is uniform in phase, high in purity, good in crystallization and high in yield; the tungsten trioxide nano material is produced by using an electrochemical deposition method, so that the production process is more stable.

Description

technical field [0001] The invention relates to the technical field of gas-sensing sensors, in particular to a composite nano-material array gas-sensing sensor and a preparation method thereof. Background technique [0002] With the improvement of people's living standards and the improvement of scientific and technological strength, modern families have higher and higher requirements for kitchens, and more and more attention is paid to the hidden dangers of kitchen safety. When the combustible gas accumulates to a certain concentration in the air, it is very prone to explosions and other safety accidents, causing heavy losses to personal safety and public property. [0003] The gas alarm can detect the concentration of combustible gas in the area, install it in a place where gas leakage may occur, and generate electric current through chemical reaction to detect the gas existing in the air, and at the same time, it also has a certain degree of response to the gas content in...

AI Technical Summary

Problems solved by technology

[0004] The gas alarm is composed of a detector and an alarm control host. The detector can be a gas sensor, which is a sensor used to detect gas concentration and composition. The sensing material of an existing gas sensor is usually a layer of Composed of single-sided etched porous silicon, there are defects of low sensitivity and precision, and slow sensing speed. When used in gas alarms, false alarms or missed alarms may occur, which may bring safety hazards

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