Ultraviolet radiation dose monitor and preparation method thereof
An ultraviolet radiation and monitor technology, applied in the semiconductor field, can solve the problems of high power consumption and low precision, and achieve the effects of low power consumption, small size and simple structure
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[0035] The core of the invention is to provide an ultraviolet radiation dose monitor and a preparation method thereof, which have low power consumption and high precision.
[0036] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.
[0037] refer to figure 1 As shown, the ultraviolet radiation dose monitor provided by the present invention includes:
[0038] Flexible substrate layer 10, the material can be selected from flexible substrates such as PET, PI or PEN, and the material of the flexible substrate 10 can also be selected from a heavily doped silicon wafer with a silicon oxide layer, wherein the heavily doped silicon The chip has good conductivity and can function as a gate, and the built-in silicon oxide layer can act as an insulating ...
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