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Method for preparing carbon nano-pipe on golden/iron series element composite membrane

A technology of iron-based elements and carbon nanotubes, which is applied in the field of carbon nanotube preparation, can solve problems such as high cost, high requirements for equipment and complicated processes

Inactive Publication Date: 2004-11-03
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is not to go through the pretreatment process of corroding the metal catalyst layer on the substrate, so as to overcome the shortcomings in the background technology such as complex process, high cost, long growth cycle, and high requirements for equipment; and Growing carbon nanotubes in a high hydrogen atmosphere makes carbon nanotubes have high application value and good application prospects in field emission, hydrogen storage and chemical sensors.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] A block is placed on the substrate, and the lower surface of the block is in contact with the surface of the gold / nickel composite film on the substrate. A 60nm thick nickel layer and a 500nm thick gold layer were sputtered on the substrate. The flow ratio of hydrogen and methane was 100:2, the gas pressure was 2800 Pascals, the growth time was 30 minutes, and the substrate temperature was changed to 650°C, 720°C, and 800°C, respectively. At a temperature of 650°C, carbon tubes with diameters ranging from 200 to 1000nm were obtained; at temperatures of 720°C and 800°C, carbon nanotubes with diameters ranging from 30 to 70nm were obtained. A better substrate temperature range is 700-850°C.

Embodiment 2

[0018] A block is placed on the substrate, and the lower surface of the block is in contact with the surface of the gold / nickel composite film on the substrate. A 60nm thick nickel layer and a 500nm thick gold layer were sputtered on the substrate. The flow ratio of hydrogen and methane was 100:2, the substrate temperature was 720°C, the growth time was 30 minutes, and the gas pressure was changed to 2000 Pascal, 2800 Pascal, and 3600 Pascal, respectively. Under the condition of air pressure of 2000 Pascals, carbon nanotubes with diameters ranging from 20 to 70 nm were obtained; under the conditions of air pressure of 2800 Pascals, carbon nanotubes with diameters ranging from 30 to 70 nm were obtained; and under the conditions of air pressure of 3600 Pascals, prepared There are two different carbon nanotubes with a diameter of about 200nm and about 1000nm. A better air pressure range is 2000-3000 Pascals.

Embodiment 3

[0020] A block is placed on the substrate, and the lower surface of the block is in contact with the surface of the gold / nickel composite film on the substrate. A 60nm thick nickel layer and a 500nm thick gold layer were sputtered on the substrate. The substrate temperature was 720°C, the air pressure was 2800 Pascals, the growth time was 30 minutes, and the flow ratios of hydrogen and methane were changed to 100:2, 100:10 and 100:50, respectively. Under the condition that the flow ratio of hydrogen and methane is 100:2, the diameter range of carbon nanotubes is 30-70nm; under the condition of the flow ratio of hydrogen gas and methane is 100:10, the diameter range is 70-500nm. Under the condition that the flow ratio of hydrogen and methane is 100:50, the obtained carbon tube diameter ranges from 70 to 700 nm. A better flow ratio range of hydrogen and methane is 100: (1-5).

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Abstract

A process for preparing carbon nanotubes on the copmosite film of Au / Fe-series elements includes such steps as sputtering Fe or Co or Ni layer on the Si or SiO2 substrate, sputtering Au layer to obtain composite film catalyst, putting the substrate in resistance-wire CVD equipment, introducing hydrogen gas and methane, and growing high-purity multi-wall carbon nanotubes (20-200 nm) at 600-950 deg.C and 12-30 Tor for 10-120 min. Another approach is also disclosed. Its advantages are simple process, short period and low cost.

Description

technical field [0001] The invention belongs to a method for preparing carbon nanotubes, in particular to a method for directly preparing carbon nanotubes by using a gold / iron series element composite film as a catalyst under a high-concentration hydrogen atmosphere. Background technique [0002] The unique structure of carbon nanotubes determines that it has many special physical properties, which makes this quasi-one-dimensional material show very important theoretical research value and practical application prospects, and has become a research hotspot in the world in recent years. At present, the methods for preparing carbon nanotubes mainly include: arc discharge method, laser ablation method, pyrolysis method, chemical vapor deposition (CVD) method and so on. [0003] The prior art that is similar to the present invention is the invention patent application disclosed on December 20, 2000, the publication number CN1277145A, entitled "Using thermal CVD method to synthesi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B31/02
Inventor 孙晔顾长志吕宪义金曾孙
Owner JILIN UNIV