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Composite thin film and preparing method thereof

A technology of composite film and film layer, applied in separation methods, chemical instruments and methods, membranes, etc., can solve problems such as cracks, and achieve the effect of high hydrogen permeability

Inactive Publication Date: 2003-12-10
W C HERAEUS GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It should be noted that these diffusion barriers, often have cracks

Method used

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  • Composite thin film and preparing method thereof
  • Composite thin film and preparing method thereof
  • Composite thin film and preparing method thereof

Examples

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Effect test

example 1

[0045] To prepare a composite film 1, an open-pored substrate 1a made of stainless steel with a thickness of 0.3 mm was cleaned, and a suspension containing nickel powder with a particle size of less than 1 μm was applied to one side thereof to fill the large pores and serve to eliminate surface inhomogeneities of the substrate 1a. The nickel powder is sintered together with the substrate 1a at 600° C. for about 1 hour to make it firmly bonded. The thus treated, cooled substrate 1a is then cleaned in an ultrasonic bath to remove loose nickel particles. Next, a diffusion barrier layer 1b made of TiN was formed on the treated surface of the substrate to a thickness of 2 m by cathode sputtering. The diffusion barrier layer 1b, which consists of only one single layer, is then directly electroplated to form a 4 μm thick palladium film on the electronically conductive surface facing away from the substrate 1a Layer 1c. The electrodeposition of palladium is carried out from an alk...

example 2

[0049]To prepare a composite film 1, as described in Example 1, an open-pored substrate 1a made of stainless steel with a thickness of 0.3 mm was cleaned and a suspension containing nickel powder with a particle size of less than 1 μm was applied to it. Its side is used to fill large pores and to eliminate surface inhomogeneities of the substrate 1a. The nickel powder is sintered together with the substrate 1a at 600° C. for about 1 hour to make it firmly bonded. The thus treated, cooled substrate 1a is then cleaned in an ultrasonic bath to remove loose nickel particles. Next, a diffusion barrier layer 1b made of TiN was formed on the treated surface of the substrate to a thickness of 2 m by cathode sputtering. The diffusion barrier layer 1b, which consists of only one single layer. Next, on the conductive surface facing away from the substrate 1a, it is covered by a dipping method with a palladium seed (which does not form a dense layer but exists as islands) . Next, elec...

example 3

[0051] To prepare a composite film 1, a perforated substrate 1a made of stainless steel with a thickness of 0.25 mm was cleaned. An alumina sol (for example, Nyacol AL20 from PQ Corporation) is applied to one side of the substrate 1a thereof to form a diffusion barrier 1b consisting of two monolayers to fill large pores and used to eliminate the unevenness of the surface of the substrate 1a. The substrate 1a was dried and heated at 650°C for about 2 hours to form a scratch-resistant aluminum oxide layer as the first monolayer of the diffusion barrier layer 1b. To obtain said diffusion barrier 1b, a second monolayer of TiN is subsequently applied by means of cathode sputtering onto the first monolayer of aluminum oxide on the side facing away from said substrate 1a. The conductive surface or second monolayer of the diffusion barrier layer 1b facing away from the substrate 1a is then subjected to direct electroplating to form a palladium thin film layer with a thickness of 5.5 ...

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Abstract

Composite membrane (1) comprises a layer system consisting of a rigid non-self supporting non-metallic inorganic diffusion barrier layer (1b) and hydrogen-permeable non-porous metallic membrane layers (1c) arranged on a flexible metallic substrate (1a). Preferred Features: The diffusion barrier layer is arranged between the substrate and one membrane layer and is formed as a single layer. The single layer is open-pored and / or has micro-tears. The substrate has an open porosity in the region of 15-60%. At least one of the membrane layers is galvanically deposited on the surface of the diffusion barrier layer facing away from the substrate. An Independent claim is also included for a process for the production of the composite membrane.

Description

technical field [0001] The invention relates to a composite film having a bendable metal substrate and a thin layer system arranged on at least one surface of said substrate; said thin layer system is composed of a rigid, non-freestanding, non-metallic An inorganic diffusion barrier layer and at least one hydrogen permeable, non-porous metal film layer; the diffusion barrier layer is disposed between the substrate and the at least one film layer, and is formed of at least one A single layer is formed. The invention also relates to a method for preparing said composite film. Background technique [0002] Such films are known, for example, from EP783919A1 or EP718031A1. Therein is disclosed a composite membrane having a hydrogen permeable metal or hydrogen permeable ceramic support, wherein said support is flexible and rigid. The carrier can be made porous by using a stainless steel fabric. A porous, flexible diffusion barrier consisting of a layer of non-sintered material...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/22B01D67/00B01D69/10B01D69/12B01D71/02B32B15/04C01B3/50C01B3/56
CPCB01D2325/08C01B2203/0465B01D53/228B01D67/0072B01D71/022B01D69/12C01B3/503B01D67/0041B01D71/02Y10S55/05B01D67/0069B01D69/10C01B3/505C01B2203/0405B01D67/00411B01D71/05B01D71/02231B01D69/1216B01D71/02232B01D69/108B32B15/01
Inventor W·扬奇·D·勒普顿T·吉塞尔
Owner W C HERAEUS GMBH
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