Manufacturing method of macromolecular light-conductive wave duct
A manufacturing method and optical waveguide technology, applied in the directions of light guide, optical waveguide light guide, optics, etc., can solve the problems such as the inability to reduce the viscosity of the filling liquid, the slow filling speed, and the inability to mass production.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0099] A thick film photoresist (resist, manufactured by MicroChemical, SU-8) was coated on a silicon substrate by spin coating, pre-baked at 80°C, exposed and developed through a photomask, and formed into a square cross section. Convex portion (width: 50 μm, height: 50 μm, length: 150 mm). Then, it is baked at 120° C. (post-bake) to form a master disc for making the core of the optical waveguide.
[0100] Next, after coating the release agent on the original disc, pour it into a thermosetting dimethylsiloxane resin (manufactured by DOW CORNING ASIA: SYLGARD 184), heat and cure it at 120°C for 30 minutes, and then peel it off to produce a The model corresponding to the concave part of the above-mentioned section is a square convex part (thickness of the mold is 3mm). Next, both ends of the model were cut off, and the input and output parts of the ultraviolet curable resin described below were made to form a mold.
[0101] Next, the mold and a film substrate having a film th...
Embodiment 2
[0103] Using the same method as in Example 1, a master plate having a square-shaped convex portion (width: 50 μm, height: 50 μm, length: 150 mm) was formed to produce the core of the optical waveguide. Next, in the same manner as in Example 1, after making a model, both ends of the model were cut off. Next, the mold and a heat-resistant transparent resin film (film thickness 188 μm) larger than the size of the mold were tightly adhered. After that, when a thermosetting resin (manufactured by JSR Corporation) with a viscosity of 500mPa·s is dropped a few drops on the input and output part of one end of the mold, the thermosetting resin is filled into the aforementioned concave part by capillary phenomenon, and it is placed Heat in a furnace at 130° C. for 30 minutes to harden the thermosetting resin. Thereafter, when the mold is peeled off from the heat-resistant transparent resin film, a core having the same shape as the convex portion of the master is formed on the heat-resi...
Embodiment 3
[0104] Using the same method as in Example 1, a master plate having a square-shaped convex portion (width: 50 μm, height: 50 μm, length: 150 mm) was formed to produce the core of the optical waveguide. Next, in the same manner as in Example 1, after making a model, both ends of the model were cut off. Next, the mold and a heat-resistant transparent resin film (film thickness 188 μm) larger than the size of the mold were tightly adhered. Thereafter, an ultraviolet curable resin (manufactured by JSR Corporation: PJ3001) with a viscosity of 1300 mPa·s was dropped several times on the input and output portion at one end of the mold. Under the close adhesion of the mold and the heat-resistant transparent resin film, place it in a container depressurized to 1.0Pa with a vacuum pump. Immediately thereafter, the ultraviolet curable resin is filled into the aforementioned recesses by capillary phenomenon. After taking out from the container, at 50mW / cm 2 The UV light penetrates the ...
PUM
| Property | Measurement | Unit |
|---|---|---|
| viscosity | aaaaa | aaaaa |
| diameter | aaaaa | aaaaa |
| viscosity | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 