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Manufacturing method of macromolecular light-conductive wave duct

A manufacturing method and optical waveguide technology, applied in the directions of light guide, optical waveguide light guide, optics, etc., can solve the problems such as the inability to reduce the viscosity of the filling liquid, the slow filling speed, and the inability to mass production.

Inactive Publication Date: 2004-01-14
FUJIFILM BUSINESS INNOVATION CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, as mentioned above, if the optical waveguide is produced by the micromolding method, the volume shrinkage rate during curing can be reduced (thus the transmission loss can be reduced) and the viscosity of the filling liquid (monomer, etc.) can be reduced to facilitate filling, Both cannot be satisfied at the same time
Therefore, if the priority is given to reducing the transmission loss, the viscosity of the filling liquid cannot be reduced below a certain level, and the filling speed will be slowed down, making mass production impossible.
In addition, the aforementioned micromolding method is based on the premise of using glass and silicon substrates, so flexible film substrates cannot be considered.

Method used

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  • Manufacturing method of macromolecular light-conductive wave duct
  • Manufacturing method of macromolecular light-conductive wave duct

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0099] A thick film photoresist (resist, manufactured by MicroChemical, SU-8) was coated on a silicon substrate by spin coating, pre-baked at 80°C, exposed and developed through a photomask, and formed into a square cross section. Convex portion (width: 50 μm, height: 50 μm, length: 150 mm). Then, it is baked at 120° C. (post-bake) to form a master disc for making the core of the optical waveguide.

[0100] Next, after coating the release agent on the original disc, pour it into a thermosetting dimethylsiloxane resin (manufactured by DOW CORNING ASIA: SYLGARD 184), heat and cure it at 120°C for 30 minutes, and then peel it off to produce a The model corresponding to the concave part of the above-mentioned section is a square convex part (thickness of the mold is 3mm). Next, both ends of the model were cut off, and the input and output parts of the ultraviolet curable resin described below were made to form a mold.

[0101] Next, the mold and a film substrate having a film th...

Embodiment 2

[0103] Using the same method as in Example 1, a master plate having a square-shaped convex portion (width: 50 μm, height: 50 μm, length: 150 mm) was formed to produce the core of the optical waveguide. Next, in the same manner as in Example 1, after making a model, both ends of the model were cut off. Next, the mold and a heat-resistant transparent resin film (film thickness 188 μm) larger than the size of the mold were tightly adhered. After that, when a thermosetting resin (manufactured by JSR Corporation) with a viscosity of 500mPa·s is dropped a few drops on the input and output part of one end of the mold, the thermosetting resin is filled into the aforementioned concave part by capillary phenomenon, and it is placed Heat in a furnace at 130° C. for 30 minutes to harden the thermosetting resin. Thereafter, when the mold is peeled off from the heat-resistant transparent resin film, a core having the same shape as the convex portion of the master is formed on the heat-resi...

Embodiment 3

[0104] Using the same method as in Example 1, a master plate having a square-shaped convex portion (width: 50 μm, height: 50 μm, length: 150 mm) was formed to produce the core of the optical waveguide. Next, in the same manner as in Example 1, after making a model, both ends of the model were cut off. Next, the mold and a heat-resistant transparent resin film (film thickness 188 μm) larger than the size of the mold were tightly adhered. Thereafter, an ultraviolet curable resin (manufactured by JSR Corporation: PJ3001) with a viscosity of 1300 mPa·s was dropped several times on the input and output portion at one end of the mold. Under the close adhesion of the mold and the heat-resistant transparent resin film, place it in a container depressurized to 1.0Pa with a vacuum pump. Immediately thereafter, the ultraviolet curable resin is filled into the aforementioned recesses by capillary phenomenon. After taking out from the container, at 50mW / cm 2 The UV light penetrates the ...

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Abstract

A process for producing an optical waveguide is provided, the process containing the steps of: (1) forming a layer of a resin material for forming a template on a master having protrusions for optical waveguides, releasing the layer to duplicate the master, and cutting both ends of the layer to expose depressions corresponding to the protrusions for optical waveguides as a template; (2) closely contacting a film substrate having good adhesiveness to the template with the template; (3) contacting one end of the template with an ultraviolet ray curable resin or a thermosetting resin to be a core, so as to fill the ultraviolet ray curable resin or the thermosetting resin in the depressions of the template by capillary phenomenon; (4) curing the ultraviolet ray curable resin or the thermosetting resin thus filled, and releasing the template from the film substrate; (5) and forming a clad layer on the film substrate.

Description

technical field [0001] The present invention relates to an optical waveguide, and in particular to a manufacturing method of a flexible polymer optical waveguide. Background technique [0002] Among the production methods of the polymer waveguide, (1) impregnating the monomer (monomer) in the film, selectively exposing the core part to change the refractive index, and superimposing the film (selective superposition method) has been proposed so far. ; (2) After the core layer and cladding layer are coated, reactive ion etching is used to form the cladding part (RIE method); (3) the ultraviolet resin that is used to add a sensitive optical material to the polymer material is used, and then Utilize the lithography method of exposure and development (direct exposure method); (4) Utilize the method of injection molding; (5) After coating the core layer and the cladding layer, expose the core part to change the refractive index of the core part ( Photobleaching, photobleaching) e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/13B29D11/00G02B6/12G02B6/138
CPCG02B2006/121B29D11/00663G02B6/138G02B2006/12069
Inventor 清水敬司大津茂实谷田和敏圷英一
Owner FUJIFILM BUSINESS INNOVATION CORP