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High temperature metal boat and method of plating tin doped indium oxide transparent condutive membrane

A technology of transparent conductive film and tin-doped indium oxide, which is applied in metal material coating process, sputtering plating, vacuum evaporation plating, etc., can solve the problem that affects the stability of the plating process and does not form a process flow with industrial value and other issues, to achieve good market prospects and application value, good chemical stability, and easy control effects

Inactive Publication Date: 2004-07-21
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

However, due to the phase corrosion characteristics of indium tin oxide and boats made of conventional materials, the stability of the plating process will be seriously affected, and at the same time, many uncontrollable impurities will be brought to the film.
Therefore, there is no process flow with industrial value

Method used

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  • High temperature metal boat and method of plating tin doped indium oxide transparent condutive membrane
  • High temperature metal boat and method of plating tin doped indium oxide transparent condutive membrane
  • High temperature metal boat and method of plating tin doped indium oxide transparent condutive membrane

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Embodiment Construction

[0020] see first figure 1 , figure 1 It is a schematic structural diagram of the high-temperature evaporation boat made of tantalum sheets in the present invention. The present invention uses tantalum sheets that have been annealed at a high temperature of 900--1200°C to make the evaporation boat; the thickness of the tantalum sheets is 3mm.

[0021] The evaporation boat is made of tantalum; the evaporation boat is a long ark, and the relationship between its size and structure is:

[0022] The total length of the evaporation boat, including the two fins, is (88±3)mm,

[0023] The length of the boat tank: depth: width = (45 ± 2) mm: 10 ± 3) mm: (24 ± 3) mm,

[0024] The thickness of the tantalum sheet is 3mm.

[0025] The size change range of the above boat has been proved to be valid data through experiments. According to our experimental results, if the depth is small, the heat gathering performance of the whole boat is poor. Therefore, if we want to obtain enough heat to...

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Abstract

A high-temp motel evaporator with two fins (45+ / -2)X(10+ / -3)X (24+ / -3) mm is made of the tantalum plate and annealed at 900-1200 deg.C. A method for evaporating the transparent film of Sn-doped indium oxide features that its current for evaporating is 150-200 A, the aerated oxygen is 12+ / -2 seem, its vacuum level is (0.9-1)X10 to the power -2 Pa, and its baking temp for bottom is 280+ / -20 deg.C.

Description

technical field [0001] The invention relates to a vacuum coating technology, in particular to a high-temperature metal boat and a method for plating a tin-doped indium oxide transparent conductive film by using the high-temperature metal boat. Background technique [0002] Tin-doped indium oxide (In 2 o 3 : Sn, namely ITO) oxide semiconductor thin film has excellent conductivity, high transmittance in the visible region and reflectivity in the infrared region, and has good adhesion and stability to the substrate. Therefore, it has been widely used in liquid crystal and plasma flat panel display devices, solar cell photovoltaic panels and electrode materials in special windows, and other optoelectronic fields. [0003] The preparation methods of ITO thin films mainly include the following types: electron beam evaporation, chemical vapor deposition, reactive ion implantation, and magnetron sputtering. Among them, the sputtering method is widely used because of its good cont...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/26
Inventor 徐学科范正修汤兆胜邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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