Method for improving Ag base composite transparent conductive film stability

A transparent conductive film, stability technology, applied in optical components, optics, instruments, etc., can solve problems such as poor stability, achieve the effect of improving thermal stability, improving film quality, and reducing the tendency of agglomeration

Inactive Publication Date: 2005-08-03
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the invention is to overcome the deficiencies in the prior art, provide a kind of method that improves the stability of Ag-based composite transparent conductive film, set out from the characteristics of material mutual wettability, design a kind of new effective transition layer (passivation layer ), so that the transition layer has as little adverse effect on its photoelectric performance as possible while improving the stability of the original film layer, so as to overcome the Ag-based composite transparent conductive multilayer film, especially the multilayer with metal oxide as the dielectric layer Insufficiency of poor membrane stability

Method used

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  • Method for improving Ag base composite transparent conductive film stability
  • Method for improving Ag base composite transparent conductive film stability

Examples

Experimental program
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Embodiment 1

[0012] G / 25nmTiO 2 / 18nmAg / 2.5nmTi / 28nmTiO 2 with G / 25nmTiO 2 / 18nmAg / 28nmTiO 2 Compared

[0013] The multilayer film preparation process conditions are as follows: the substrate is a polished quartz crystal slice 40mm×20mm×1mm and a Si(111) sheet. Chemical and ultrasonic cleaning. The substrate temperature was 45°C. Vacuum degree: the background vacuum is 1×10-2Pa, after bombarding the substrate with ion beam for 15min, the vacuum is then pumped to 3.5×10-3Pa. Raw material and heating source: Ag: particles with a purity of 99.9%, heated by molybdenum boat resistance wire; TiO 2 : The purity is 99.9% particles, water-cooled crucible electron gun heating. The deposition rate is 0.3nm / s; Ti: particles with a purity of 99.9%, heated by an electron gun in a water-cooled crucible. The deposition rate was 0.3 nm / s. At the same time, the film layer adopts a heat treatment process of 537K×40min, and the treatment atmosphere is air.

[0014] After adding 2.5nmTi transition la...

Embodiment 2

[0018] G / 25nmTiO 2 / 18nmAg / 3nmTi / 28nmTiO 2 with G / 25nmTiO 2 / 18nmAg / 28nmTiO 2 Contrasting multilayer film preparation process conditions are the same as embodiment 1, and its thermal stability performance comparison index is shown in the following table:

[0019] After adding 3.0nmTi transition layer, thermal stability performance comparison index:

[0020]

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Abstract

The present invention relates to method of raising stability of composite transparent conductive Ag-base film and belongs to the field of film material and film optics. In the sandwiched multilayer TiO2/Ag/TiO2 film structure, one additional Ti layer of 2-3 nm thickness is coated between the metal Ag layer and the base dielectric TiO2 layer, and the Ti layer is used as the optimizing layer between the metal Ag layer and the base dielectric TiO2 layer and can raise the heat stability of the multilayer film structure while producing few influence on the optoelectronic performance of the multilayer film structure.

Description

technical field [0001] The invention relates to a method for improving the stability of a film, in particular to a method for improving the stability of an Ag-based composite transparent conductive film, and belongs to the field of film materials and film optics. Background technique [0002] Since the Ag film has excellent reflective properties in the visible and infrared ranges, and the resistance of the Ag film is very low, using the principle of induced transmission and matching the reasonable dielectric layer can achieve good anti-reflection and anti-reflection in a certain spectral range. It becomes a transparent conductive film. Due to the excellent conductivity of Ag, this film has great advantages in realizing the ultra-low resistance of transparent conductive films. This composite multilayer film can be used in various fields such as low-emissivity (Low-E) glass windows, solar cell electrodes, transparent electrodes of flat panel displays, and electromagnetic shie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/116
Inventor 王振国蔡珣陈秋龙
Owner SHANGHAI JIAO TONG UNIV
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