Chemical battery with porous indium phosphide, electrochemical corrosive system and method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
- Publication Date
- 2005-12-28
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the technical field of porous semiconductor materials, in particular to a special electrochemical cell for corroding porous indium phosphide, an electrochemical corrosion system and a process method. Background technique
[0002] For the growth of quantum dots, the key is to achieve controllable size, density and position of quantum dots, and no growth defects. A general method to form semiconductor quantum dot arrays is self-organized crystal growth or selective crystal growth on a suitable mask. The quantum dots formed by the former have a high density, but the position and size are not controllable, while the position and size of the latter are controllable, but due to the limitation of the resolution of lithography technology, the density is not controllable.
[0003] The distribution of quantum dots grown in S-K mode is random and the size is not uniform. For the S-K growth mode, when the growth material has a large latt...