Technology of vacuum metal film plating on microparticle surface and its equipment

A technology of micro-particles and metal films, applied in metal material coating process, vacuum evaporation plating, sputtering plating, etc., can solve the problems of polluted environment operation procedures, uneven coating, poor compactness, etc., and achieve simple process, Exhaust gas pollution, water saving, high compactness effect
CN1718845AInactive Publication Date: 2006-01-11BEIHANG UNIV +2
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIHANG UNIV
Publication Date
2006-01-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

A technology and equipment for the vacuum plating of metallic film on the surface of microparticles features that the specimen holder is connected with the plating equipment having ultrasonic or mechanical vibration generator. Said technology includes such steps as providing microparticles and sputtering metal target, fixing target and microparticle utensil, turning on mechanical pump for vacuumizing, turning on molecular pump for further vacuumizing, turning on ultrasonic or mechanical vibrator, regulating power, frequency and time, and sputtering.
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Description

technical field

[0001] The invention relates to a vacuum coating process and equipment thereof, in particular to a vacuum coating metal film process and equipment on the surface of microparticles. Background technique

[0002] At present, compared with the bulk of the same material, the physical and chemical properties of microparticles have changed significantly, and they have excellent optical, electrical, magnetic, thermal, mechanical and chemical properties different from conventional materials. The microparticle surface film is a new type of material composed of a single layer or several layers of composite film coated on the surface of several different types of granular materials such as inorganic non-metallic, metal or organic polymers through a certain process. It can retain the main characteristics of the original component materials, and can obtain properties that the original components do not have through the composite effect. It can also make the properties of ...

Claims

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