Vacuum high pressure pulse discharge catalyzed chemical heat treatment apparatus and method

Abstract

The present invention is vacuum high pressure pulse discharge catalyzed chemical heat treatment apparatus and method. The apparatus consists of furnace seat, catalytic discharge electrode on the furnace, catalytic discharge electrode, pulse power supply, furnace gas circulating system, heat isolating layer structure, inside AC heater, etc. The method includes setting the workpiece inside furnace, heating with the inside AC heater to nitriding temperature, applying pulse voltage of 0-8000 V between the catalytic discharge electrode on the furnace and the catalytic discharge electrode, ionizing the nitrogen containing gas inside the furnace and of pressure 100-50000 Pa to discharge intensively to generate active nitrogen atoms permeating into the workpiece at high speed, and circulating nitriding gas for passing by the workpiece homogeneously. The present invention has the advantages of fast nitriding, high heat efficiency, no oxidation of the workpiece, etc.

Description

Technical field [0001] The invention relates to the technical field of chemical heat treatment, in particular to a vacuum high voltage pulse discharge catalytic chemical heat treatment equipment and method Background technique [0002] The existing vacuum ion nitriding is a process that can improve the wear resistance, corrosion resistance, fatigue resistance, high temperature oxidation resistance and the service life of the workpiece on the metal surface. It usually puts the workpiece to be processed in a vacuum container, fills it with low-pressure nitrogen-containing gas, uses the workpiece as the cathode, and the wall cover of the vacuum container as the anode. After a sufficiently high DC voltage is applied between the cathode and the anode, the thin gas between the two electrodes is ionized, thereby generating a glow discharge. When the gas works in the abnormal glow discharge area, there are a lot of nitrogen positive ions and electrons in the furnace space, the posi...

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Problems solved by technology

Although the versatility is strong, there are still many shortcomings: ①The vacuum furnace body is all cooled by circulating water, and the cooling water takes away a lot of heat, which consumes a lot of energy

②Because the cooling water on the furnace wall takes away a lot of heat, the heating rate of the workpiece is slow

③ When processing slender or complex-shaped workpieces, the glow discharge intensity per unit surface area of ​​the workpiece is different, and the temperature uniformity is very poor

④Because the workpiece has a cathode potential, arcing often occurs on the surface of the workpiece, which affects the surface quality of the workpiece

⑤ Uneven distribution of gas in the furnace

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