Organic thin-film transistor device and method for manufacturing same
A technology of organic thin films and manufacturing methods, applied in transistors, semiconductor/solid-state device manufacturing, electrical components, etc., can solve problems such as a lot of time, insufficient effect, and troublesome cleaning.
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Embodiment 1
[0348] At 50W / m 2 Under the condition of 100μm thick PES film substrate F, corona discharge treatment was applied to the surface of the PES film substrate F. The coating solution of the following composition was applied to make the dry film thickness 2μm. After drying at 90°C for 5 minutes, the temperature was 60W / cm It is cured for 4 seconds from a distance of 10cm under a high-pressure mercury lamp.
[0349] Dipentaerythritol hexaacrylate monomer 60g
[0350] Dipentaerythritol hexaacrylate 2-mer 20g
[0351] Dipentaerythritol hexaacrylate trimer or more ingredients 20g
[0352] Diethoxy benzophenone UV initiator 2g
[0353] Silicone surfactant 1g
[0354] Methyl ethyl ketone 75g
[0355] Methyl propylene glycol 75g
[0356] Furthermore, atmospheric pressure plasma treatment was continuously performed on the layer under the following conditions to provide a silicon oxide film with a thickness of 50 nm. As described above, the pull-down layer 1 having a two-layer structure is prov...
Embodiment 2
[0391] Except that the organic semiconductor materials in the inventive sample No. 1 to the inventive sample No. 4 and the comparative sample No. 1 in Example 1 are replaced with the following materials, it is the same as the inventive sample No. 1 to The sample No. 4 of the present invention and the sample No. 1 of the present invention were produced in the same manner as the sample No. 5 of the present invention to the sample No. 8 of the present invention and the comparative sample No. 2 respectively.
[0392] Organic semiconductor materials:
[0393] A chloroform solution of a poly(3-hexylthiophene) regioregular body (manufactured by Aldrich Corporation) was prepared to sufficiently purify the content of Zn and Ni to 10 ppm or less. Use a piezoelectric inkjet method to eject the solution to form a pattern. After drying at room temperature, 2 The heat treatment is performed at 50°C for 30 minutes in a gas replacement atmosphere. At this time, the film thickness of poly(3-hexylt...
Embodiment 3
[0396] The substrate before the formation of the semiconductor layer was produced as follows.
[0397] (Substrate 1)
[0398] As in Example 1, after the gate insulating layer (silicon oxide layer with a film thickness of 200 nm) was provided by the atmospheric pressure plasma method, before the formation of the thin film 4, nitrogen: oxygen = 99:1 (volume ratio) as a discharge gas was flowed in Figure 8 In the shown atmospheric pressure plasma discharge treatment device, the substrate is exposed to the excitation discharge gas for 3 seconds for pretreatment. In addition, as the high-frequency power supply, a high-frequency power supply (frequency: 40kHz) manufactured by Hiden Laboratories was used, and the discharge power was set to 10W / cm 2 get on.
[0399] Then, the thin film 4 was formed in the same manner as in Example 1.
[0400] (Substrate 2~4)
[0401] Except that the material of the reaction gas used in the atmospheric pressure plasma method was changed as shown in Table ...
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