Nano superhard composite film tool with high adhesion and its deposition method

A high-adhesion, composite film technology, applied to the lathe tool, planer/slotting machine tool, milling cutter, etc., can solve the problems of expensive equipment, low equipment configuration, etc., to achieve excellent coating quality, The effect of perfect function and high production efficiency

Inactive Publication Date: 2006-05-24
吴大维
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Looking at the vacuum ion coating equipment imported from famous foreign manufacturers in recent years, such as the PVD vacuum ion coating equipment imported from Germany CemeCon Company, British Teer...

Method used

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  • Nano superhard composite film tool with high adhesion and its deposition method
  • Nano superhard composite film tool with high adhesion and its deposition method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0074] 1. Deposition process of superhard composite film

[0075] ①The workpiece is loaded into the furnace

[0076] The workpiece 9 is chemically cleaned, and after being dehydrated and dried, it is clamped on the workpiece frame 6, and the cleanliness of the workpiece 9 and the workpiece frame 6 will be maintained in all operations.

[0077] ② Vacuuming and workpiece baking

[0078] After the workpiece 9 is clamped, close the furnace door 5 of the vacuum chamber 4, start the vacuum unit according to the operating procedures of the vacuum unit, and pump the vacuum chamber 4 to a high vacuum of 3×10 -3 Pa, then turn on the baking heating power supply, control the revolution speed of the workpiece to 4-6 circles per minute, keep the baking temperature at 450±5°C, and keep the vacuum degree at (3±0.5)×10 -3 Pa, maintain for 30 minutes and enter the next step.

[0079] ③Glow ion cleaning

[0080] Introduce argon (Ar) gas, control the air pressure to 2Pa, turn on the pulse bia...

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Abstract

The invention relates to a high adhesion nm super-hard compounding film cutting tool and the depositing. It is deposited nitride case, basal film, super-hard film, and self- lubricating film on the cutting tool. The invention has an entire metal cutting tool high quality coating blooming technology. It takes high efficiency plasma nitride-treat to enhance cutting tool basal body, and taking coating super-hard compounding film to make the film has high adhesive force. The invention could be used in kinds of mould and cutting tools.

Description

technical field [0001] The invention relates to a surface composite strengthening method in the field of new materials, in particular to a deposition method of a superhard composite film with a nanometer superlattice structure. Background technique [0002] The composite treatment technology of performing ion nitriding treatment on the surface of metal cutting tools first, and then coating hard film is a new type of material surface strengthening technology, and it is a very effective method to improve the adhesion of the coating layer. If ordinary heat-activated ion nitriding is used, a temperature environment above 500°C is required, and the nitriding time is 5 to 6 hours, and the coating and nitriding cannot be completed in one device. Such process efficiency is low, and industrial production is difficult to accept. Li Guoqing of Dalian University of Technology used a hot wire plasma source to improve the efficiency of ion nitriding. After nitriding at 380°C for 3 hours,...

Claims

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Application Information

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IPC IPC(8): C23C28/00B23B27/14B23C5/16B23D13/00B23D81/00C23C8/24C23C14/35
Inventor 吴大维吴越侠
Owner 吴大维
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