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Method for preparing composite film of carbon similar to generic diamond containing Nano granules of silicon dioxide

A nano-particle and silicon dioxide technology, which is applied in the direction of electrolytic inorganic material coating, electrolytic coating, coating, etc., can solve the problems of high temperature, strict process parameters, complex devices, etc., and achieve good uniformity

Inactive Publication Date: 2006-07-05
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

However, the experimental device for gas phase synthesis is complex, requiring high vacuum and high temperature, and the process parameters are strict.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0015] Weigh 20ml DDS and 80ml methanol, mix the two to form a DDS / methanol solution with a volume ratio of 1:4. The solution was poured into the electrolysis reactor, and the temperature of the electrolyte was kept constant at 50°C by adjusting the temperature of the heating water bath. The pre-cleaned single crystal silicon wafer is clamped on the graphite sheet as the cathode, and the pure graphite sheet is used as the anode. A DC voltage of 1200V was applied to the two electrodes, and the voltage remained unchanged during the deposition process, and the deposition time was 5 hours.

[0016] The Raman spectrum showed obvious D peak and G peak, showing the typical structural characteristics of diamond-like carbon. X-ray photoelectron spectroscopy analysis found that silicon atoms and oxygen atoms on the film surface chemically bond and form Si-O bonds, and the binding energy of carbon atoms is consistent with the results of carbon atoms in a pure diamond-like carbon film obtaine...

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Abstract

This invention relates to a preparation method for silicon dioxide nano-particle-contained diamond-like carbon composite thin films. In this method, graphite is adopted as anode, a monocrystal silicon wafer is adopted as cathode and a methanol solution of dimethyldiethoxysilane is adopted as deposition fluid. A silicon dioxide nano-particle-contained diamond-like carbon composite thin film is obtained on the cathode under a high DC voltage. This method has the advantages of simple facilities, low deposition temperature and large synthesis area for silicon dioxide nano-particle-contained diamond-like carbon films, and hopefully it would be applicable in the fields of mechanical friction, electrics and optics.

Description

Technical field [0001] The invention relates to a method for preparing a diamond-like carbon composite film containing silicon dioxide nanoparticles. technical background [0002] Diamond-like carbon (DLC) films are considered to be ideal materials in the fields of light, electricity and friction protection coatings due to their similar properties to diamonds. These properties include excellent chemical inertness, extremely high hardness, extremely low friction coefficient, atomic level surface finish, good optical transparency and high thermal conductivity. However, the diamond-like carbon film has a high residual stress, which greatly limits its application. These residual stresses reduce the bonding force of the film base, and under the action of high contact stress, the film will crack and delaminate. In order to reduce the internal stress of the film without loss of hardness, efforts have been made to develop nanostructured diamond-like carbon composite films. Diamond-like c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D9/08C25D15/00
Inventor 徐洮杨生荣陈刚阎兴斌
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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