Acid corrosion solution for preparing multicrystal silicon pile surface and its using method

一种酸腐蚀、多晶硅的技术,应用在化学仪器和方法、表面浸蚀组合物、半导体/固态器件制造等方向,能够解决废水处理成本高、重金属环境污染危害比较大等问题,达到消除环境的危害的效果
CN1821446AActive Publication Date: 2006-08-23WUXI SUNTECH POWER CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
WUXI SUNTECH POWER CO LTD
Publication Date
2006-08-23

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Abstract

The present invention discloses acid corrosion solution for preparing polycrystalline silicon pile surface and its usage. The solution is compounded with oxidant and hydrofluoric acid and through mixing, and the oxidant is nitrate or nitrite. During use, the cut polycrystalline silicon chip is set inside the corrosion solution for corrosion at the temperature of -10 to +25 deg.c for 0.5-20 min to eliminate damage surface caused by wire electrode cutting, with the acid corrosion time and temperature being dependent on the solution concentration. The present invention is suitable for both intermittent production and continuous production, and has easy treatment of the produced waste acid.
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Description

technical field

[0001] The invention relates to an acid etching solution for preparing polysilicon textured surfaces for solar cells, and a method for preparing polysilicon textured surfaces for solar cells using the acid etching solution. Background technique

[0002] China No. 200410064831.1 Patent Application for Invention discloses a method for preparing polysilicon textured surfaces. The method replaces traditional NaOH and KOH etching solutions with acid etching solutions to remove the damaged layer produced on the surface of polysilicon wafers during the cutting process. The original appearance of the polysilicon body surface is preserved, so that the desired suede surface is formed on the polysilicon surface after the damaged layer is removed. Although this method can meet the requirements of large-scale preparation of polysilicon textured surface, because the oxidizing agent in its acid etching solution is CrO 3 or K 2 Cr 2 o 7 Or their mixture, so there is the ...

Claims

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