High-temperature resisting one-chip integrated micro-sensor structure and system integrating method
A monolithic integration, micro-sensor technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve problems such as inapplicability, achieve low production cost, achieve miniaturization, improve space utilization and reliability. sexual effect
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[0045] The invention proposes a monolithic integration method of "manufacturing IC first and then microstructure". This method is compatible with the standard CMOS process. The multilayer interconnection line of the integrated circuit is made of refractory metal silicide or refractory metal. After the IC is completed, the microstructure is made on the same plane, that is, the microstructure and the IC circuit are on the same plane, or in the same plane as the IC circuit. IC is the substrate, and microstructures are fabricated vertically to form monolithically integrated arrays or multifunctional microsensor systems.
[0046] see figure 1 .
[0047] First, SiO is oxidized on the cleaned silicon substrate 100 2 The film 102 is used as a field oxide layer, and the photolithography or etching process is used to open concave holes on the field oxide layer to define the specific positions of the source, drain and gate of the MOS transistor, and the N or P well 108 is formed by a d...
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