Display device and method of manufacturing the same

Abstract

There are provided a first gate electrode of a first MOS transistor formed on a semiconductor layer via a gate insulating film, a second gate electrode of a second MOS transistor formed on the semiconductor layer via the gate insulating film at a distance from the first gate electrode, first and second one conductivity type impurity introduced regions formed in the semiconductor layer on both sides of the first gate electrode to serve as source / drain of the first MOS transistor, and first and second opposite conductivity type impurity introduced regions formed in the semiconductor layer on both sides of the second gate electrode to serve as source / drain of the second MOS transistor, whereby one of the first and second opposite conductivity type impurity introduced regions is formed to contact mutually to the second one conductivity type impurity introduced region. Accordingly, a semiconductor circuit in a frame region of a substrate in a display device, in which a peripheral circuit or a signal processing circuit having a CMOS FET is built, can be highly integrated rather than the prior art.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application is based upon and claims priority of Japanese Patent Application No. 2001-100395, filed in Mar. 30, 2001, the contents being incorporated herein by reference. BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to a display device and a method of manufacturing the same and, more particularly, a display device in which a peripheral circuit or a signal processing circuit having the CMOS field effect transistor is built and a method of manufacturing the same. [0004] 2. Description of the Prior Art [0005] In the active matrix liquid crystal display device in which the peripheral circuit or the signal processing circuit is built, the thin film transistors (TFTs) are employed as the CMOS transistors of the analog switch and the inverter in not only the display region but also the peripheral circuit or the signal processing circuit. [0006] The low-temperature polysilicon technology...

AI Technical Summary

Benefits of technology

[0036] According to the present invention, the n-type MOS transistor and the p-type MOS transistor employed in the CMOS circuit are formed in the same island-like semiconductor layer. Therefore, the margin region required to add the impurity can be eliminated, and also the occupied area of the semiconductor circuit made of TFTs can be reduced.

[0037] In addition, since the boundary between the mutually contact impurity introduced regions of the n-type TFT and the p-type TFT is formed zigzag, the holes formed on the boundary between these impurity introduced regions are hard to deviate to one side. Therefore, the alignment margin can be reduced and thus the occupied area of the CMOS circuit can be further reduced.

[0038] Also, according to the present invention, since at least ones of the mutually adjacent impurity introducing regions of the n-type TFT and the p-type TFT formed in the same pattern region are shared to contact, the design area of the CMOS circuit can be much more reduced.

[0039] Accordingly, since the high performance / multiple function large-scale semiconductor integrated circuits such as the digital driver, DAC, the memory, the I / O circuit, the data processing circuit, CPU, etc. can be built in the ultra high-definition display device, the high performance display device can be manufactured. Also, since the semiconductor integrated circuit can be housed in the narrow peripheral frame region of the display device, the narrower frame, the lighter weight and the compactness of the display device in which the peripheral circuit is integrally formed can be achieved. In addition, even if the manufacturing equipment with the relatively low processing precision is employed, the relatively high integration density can be obtained and therefore the significant reduction in the production cost of the display device in which the peripheral circuit is integrally formed can be achieved.

Problems solved by technology

By the way, the liquid crystal display panel, in which the peripheral circuit employing the low-temperature polysilicon in the prior art is built, cannot answer the need for the above technical trend because of following subjects.

It is difficult to form the ultra high-definition display panel, in which the digital driver is built and which has 200 dpi or more, by the manufacturing method in the prior art.

Therefore, in the case of the ultra high-definition panel having the narrow frame, it becomes difficult to built the peripheral circuit in the frame region.

Also, it is difficult for the existing large-size pattern forming system (the etching equipment, etc.) to form respective metal layer patterns with the working precision of less than 2 μm.

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