Method of preparing antifriction I1F-WS2/IF-MoS2 composite film by magnetic controlled sputtering

Abstract

A process for preparing an antifriction IF-WS2 / IF-MoS2 film features that under the proper technological parameters, the IF-WS2 and IF-MoS2 are used for co-sputtering to obtain said antifriction film. Its advantages are low friction coefficient, high resistance to moisture, oxidizing and wearing, and high adhesion to substrate.

Description

technical field [0001] The invention relates to a preparation method in the technical field of solid lubrication, in particular to a method for preparing anti-friction IF-WS by magnetron sputtering 2 / IF-MoS 2 Composite film method. Background technique [0002] Ordinary layered structure (2H) transition metal sulfide WS 2 、MoS 2 The crystal is a hexagonal structure formed by S-M-S (M=W, Mo) atoms. In each layer, the S-M atoms are bonded by strong covalent bonds, and the layers are bonded by weak van der Waals bonds. , easy to slide between layers. As a solid lubricant, 2H-WS 2 , 2H-MoS 2 In a vacuum environment, it has the advantages of small friction coefficient, large bearing capacity, and good wear resistance, and also has the advantages of strong bonding with the substrate, low evaporation rate, and radiation resistance. But due to the layered structure of WS 2 、MoS 2 The unsaturated dangling bonds at the edge of the crystal are chemically active, and are easil...

AI Technical Summary

Problems solved by technology

But pure IF-WS 2 or IF-MoS 2 Due to the low bonding strength of the film with the metal matrix, the film's insufficient bearing capacity and wear resistance under heavy loads will also cause premature failure.