Semiconductor device, method for manufacturing same, and power converter using such semiconductor device
A technology of semiconductors and light-emitting semiconductors, applied in semiconductor devices, semiconductor/solid-state device components, circuits, etc., can solve problems such as large constant loss, large total loss, and difficult power semiconductor devices
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no. 1 example
[0051] The semiconductor device according to the first embodiment of the present invention is a SiC (silicon carbide) pn diode device 19 with a withstand voltage of 8.5 kV, which will be described below with reference to FIG. 1 .
[0052] FIG. 1 is a cross-sectional view of a SiC-pn diode device 19 according to a first embodiment of the present invention. In FIG. 1, the SiC pn diode element 13 is a 4-layer hexagonal element, and a low impurity concentration n-type SiC with a thickness of approximately 95 μm is formed on the cathode region 1 of a high impurity concentration n-type SiC with a thickness of approximately 300 μm. Drift layer 2. A cathode metal electrode 7 is formed below the cathode region 1 . An anode region 3 of p-type SiC constituting a main bond with the drift layer 2 is formed in the central region of the drift layer 2 . An electric field relaxation region 4 of p-type SiC is formed around the anode region 3 . An anode metal electrode 6 is formed on the anod...
no. 2 example
[0063] The semiconductor device according to the second embodiment of the present invention is a SiC-GTO thyristor (Gate Turn-Off Thyristor) device 49 with a withstand voltage of 5 kV, and FIG. 2 shows its cross-sectional view. FIG. 3 is a cross-sectional view showing a unit obtained by cutting the GTO thyristor element 20 in FIG. 2 along a plane perpendicular to the paper. In an actual element, a plurality of units shown in FIG. 3 are connected in the left-right direction of the drawing. In addition, in FIG. 2, a plurality of units shown in FIG. 3 are connected in a direction perpendicular to the paper surface of the drawing. In FIGS. 2 and 3 , a p-type SiC buffer layer 22 having a thickness of about 3 μm is provided on a high impurity concentration n-type SiC cathode region 21 having a thickness of about 320 μm. A cathode electrode 32 is arranged below the cathode region 21 . A base layer 23 of p-type SiC having a thickness of about 60 μm and a low impurity concentration i...
no. 3 example
[0076] A semiconductor device according to a third embodiment of the present invention is an optically coupled wide-gap power semiconductor device, and FIG. 4 shows a cross-sectional view thereof. In the figure, a GaN (gallium nitride)-GTO thyristor element 51 with a withstand voltage of 3 kV and a current capacity of 160 A is used as a main power semiconductor element having a light emitting function. A SiC photodiode 52 is used as a light receiving element. A SiC photodiode 52 is provided in the same package facing the GaN-GTO thyristor element 51 .
[0077] In the GaN-GTO thyristor element 51 shown in FIG. 4 , a p-base of p-type GaN with a thickness of about 35 μm and a low impurity concentration is provided on the cathode region 51 a of n-type GaN with a thickness of about 250 μm and a high impurity concentration. polar region 53 . An n-base region 54 of high impurity concentration n-type GaN having a thickness of about 1.7 μm is formed in the central region of the p-bas...
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