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Method and apparatus for modifyig polymer high-molecular material surface

A polymer material and surface modification technology, which is applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problem that polymer polymer materials cannot tolerate and improve the anti-ultraviolet radiation, process Simple, operable effects

Inactive Publication Date: 2008-11-12
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, the deposition temperature of thin films of inorganic materials is usually at least above 200°C, and at this temperature, general polymer materials cannot withstand

Method used

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  • Method and apparatus for modifyig polymer high-molecular material surface

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Experimental program
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Effect test

Embodiment 1

[0021] 1) take the cleaned polyethylene as the substrate, place it in the reaction chamber of the pulse excited plasma chemical vapor deposition device, and fix it between the upper and lower parallel electrodes;

[0022] 2) Vacuumize the reaction chamber to a background vacuum of 3×10 -3 Pa, enter pure argon and hydrogen, keep the substrate at room temperature, turn on the pulse excitation power supply, the voltage of the power supply is 3kV, generate plasma to bombard the substrate for 20 minutes, and activate the polyethylene surface;

[0023] 3) Feed ethylene gas with a purity of 99.9% again, control the gas flow ratio as argon: hydrogen: ethylene=4:1:0.5, adjust the reaction pressure to 500Pa, adjust the frequency of the pulse excitation power supply to 1.2kHz, and the voltage to 10kV. A diamond-like carbon film was deposited on the substrate at a rate of 50 nm / min.

[0024] The deposited film was analyzed by Raman spectrum, and it had the Raman characteristic peak of di...

Embodiment 2

[0026] 1) take the cleaned polyester as the substrate, place it in the reaction chamber of the pulse excited plasma chemical vapor deposition device, and fix it between the upper and lower parallel electrodes;

[0027] 2) Vacuumize the reaction chamber to a background vacuum of 3×10 -3 Pa, enter pure argon and hydrogen, heat the substrate to 80°C, turn on the pulse excitation power supply, the voltage of the power supply is 3kV, generate plasma to bombard the substrate for 20 minutes, and activate the polyester surface;

[0028] 3) Feed ethylene gas with a purity of 99.9% again, control the gas flow ratio as argon: hydrogen: ethylene=4:0.5:0.1, adjust the reaction pressure to 300Pa, adjust the frequency of the pulse excitation power supply to 2.0kHz, and the voltage to 20kV. A diamond-like carbon film was deposited on the substrate at a rate of 60 nm / min.

[0029] The deposited film was analyzed by Raman spectroscopy, and it had Raman characteristic peaks of diamond-like, whi...

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Abstract

The invention discloses a method of polymer high molecular material surface modification. It includes the following steps: using cleaned polymer high molecular material as substrate; setting in reaction chamber of the pulse excitation plasma chemical vapor deposition device; passing over argon and hydrogen; using the plasma to activate the substrate with room temperature or 50-100 degree centigrade; passing over pure ethylene gas; controlling the gas flow ratio as argon: hydrogen: ethylene equal to 5: 1-2.0: 0.2-0.6; depositing like diamond-like film on the substrate. The invention can be used to coat DLC film on the polymer high molecular material surface under 100 degree centigrade which has the advantages of simple technology, strong operability, fast film depositing speed that 20-60nm / min, firm binding that the maximum can reach 40N, can greatly improve anti ultraviolet radiation and water, hermetic seal etc for the polymer high molecular material.

Description

technical field [0001] The invention relates to a method for surface modification of a polymer material. Background technique [0002] Polymer polymer materials such as polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), nylon, polyester, etc. are widely used in medical, health, packaging and other fields. However, there are some defects in the polymer material itself, which affects its use effect. One is the problem of material aging, that is, in the process of processing or use, affected by comprehensive factors such as light, heat, air, humidity, and corrosive gases, the material will gradually lose its original excellent performance, so that it cannot be used in the end; The low barrier properties of polymer film materials lead to problems such as poor sealing effect and short shelf life of packaged objects in packaging and other application fields; and so on. By improving the structure of polymer polymer compounds, improving their polymerization and proce...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27C23C16/52C23C16/02C08L23/06C08L23/12C08L27/06C08L77/00C08L67/00
Inventor 张溪文李敏伟
Owner ZHEJIANG UNIV
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