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Fe/Mo nano multilayer film and preparation method thereof

A nano-multilayer, preparation process technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problem that hard metal nano-multilayer film is not easy to prepare, not suitable for anti-friction applications of machinery and equipment, no Rising tribology application research and other issues, to achieve the effect of reliable performance, excellent mechanical properties, excellent wear resistance

Active Publication Date: 2009-08-26
王海斗 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the survey found that the highest hardness of the existing Au / Ni, Cu / Fe, Cu / Ni, Cu / Nb nano-multilayer films at the optimal modulation wavelength is only 3.5GPa, and the average hardness is only 2.2GPa
Due to reasons such as hard metal nano-multilayer films are not easy to prepare, it has not been found that there is a metal / metal nano-multilayer film in which hard metals (such as molybdenum Mo, tantalum Ta, etc.) have been developed as constituent metals in this area.
[0005] So far, the above-mentioned research on metal / metal nano-multilayer films has great limitations, which are only in the detection of physical properties, and have not risen to the application research of tribology.
And the above nano-multilayer films such as Au / Ni, Cu / Fe, Cu / Ni, Cu / Nb still have defects in hardness, elastic modulus and degree of bonding with metals, so they are not suitable for anti-friction applications in machinery and equipment. , especially precision instruments

Method used

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  • Fe/Mo nano multilayer film and preparation method thereof
  • Fe/Mo nano multilayer film and preparation method thereof
  • Fe/Mo nano multilayer film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Place the Mo target and the Fe target at the two target source positions respectively;

[0033] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0034] The substrate is heated to: 50°C before coating;

[0035] The working gas is: 99.999% high-purity Ar gas;

[0036] Vacuum degree: 2×140 -4 Pa;

[0037] Working air pressure: 2×140 -2 Pa;

[0038] Add negative bias voltage to improve deposition efficiency: 50V;

[0039] Setting voltage: 500V, current 1400mA, self-bias 450V, sputtering power 1400W;

[0040] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 9.37 seconds, and the deposition rate is 16nm / min;

[0041] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 10 seconds, and the deposition rate is 15nm / min;

[0042] The finally obtained Fe / Mo nanometer multi-layer bilayer thickness is 5nm.

Embodiment 2

[0044] Place the Mo target and the Fe target at the two target source positions respectively;

[0045] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0046] The substrate is heated to: 100°C before coating;

[0047] The working gas is: 99.999% high-purity Ar gas;

[0048] Vacuum degree: 1×10 -2 Pa;

[0049] Working air pressure: 5×10 -1 Pa;

[0050] Add negative bias voltage to improve deposition efficiency: 120V;

[0051] Setting voltage: 800V, current 220mA, self-bias voltage 750V, sputtering power 200W;

[0052] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 25 seconds, and the deposition rate is 12nm / min;

[0053] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 40 seconds, and the deposition rate is 7.5nm / min;

[0054] The finally obtained Fe / Mo nanometer multilayer double layer thickness is 140nm.

Embodiment 3

[0056] Place the Mo target and the Fe target at the two target source positions respectively;

[0057] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0058] The substrate is heated to: 150°C before coating;

[0059] The working gas is: 99.999% high-purity Ar gas;

[0060] Vacuum degree: 2×10 -2 Pa;

[0061] Working air pressure: 2×10 0 Pa;

[0062] Add negative bias voltage to improve deposition efficiency: 200V;

[0063] Setting voltage: 1000V, current 400mA, self-bias voltage 950V, sputtering power 300W;

[0064] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 100 seconds, and the deposition rate is 6nm / min;

[0065] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 100 seconds, and the deposition rate is 6nm / min;

[0066] The finally obtained Fe / Mo nanometer multi-layer bilayer has a thickness of 20nm.

[0067] After testing, the mec...

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Abstract

The invention discloses an Fe / Mo nanometer multilayer film, which is composed of Fe layers and Mo layers alternately deposited on a substrate, the thickness ratio of the Fe layer and the Mo layer is 0.95-1.05, and the thickness of the double layer is 5-20 nm , the total thickness of the nano-multilayer film is 1-3 μm. The nano-multilayer film has excellent mechanical properties, high hardness, high bonding strength between the film and the substrate, and excellent wear resistance; the Fe / Mo nano-multilayer film of the present invention has high hardness and "superhardness", so it can be used to improve friction The wear resistance of the surface is mostly used in mechanical equipment, especially in the anti-friction application of precision instruments.

Description

technical field [0001] The invention relates to a nanometer multilayer film, in particular to a Fe / Mo nanometer multilayer film prepared by sputtering technology. Background technique [0002] The solid lubricating film can effectively avoid the adhesive wear and strain fatigue of the friction pair by preventing the direct contact between the friction pair, and thus can significantly improve the tribological properties of the friction pair material. At present, the sulfide solid lubricating material with layered structure and low shear strength is the most widely used solid lubricating film type on the surface of friction pairs in mechanical equipment, and has played a great role in improving the lubrication state of friction pairs, such as Ferrous sulfide (FeS), molybdenum disulfide (MoS 2 )Wait. However, the hardness and modulus of the elemental Fe film and the elemental Mo film cannot meet the standards required by prior art equipment, especially precision instruments. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/14C23C14/54
Inventor 王海斗刘家浚徐滨士
Owner 王海斗
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