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Micro-device warm extrusion molding method and device based on laser heating

A laser heating and warm extrusion technology, applied in metal extrusion, metal extrusion dies, metal extrusion control equipment, etc., can solve the limitations of forming materials and processes, large resistance to cold extrusion deformation, and unstable process parameters and other problems, to achieve the effect of accurate and convenient control, precise control of thermal action, and reduction of deformation resistance

Inactive Publication Date: 2007-11-28
JIANGSU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] 1. Due to the large deformation resistance of micro-cold extrusion, and it is greatly affected by the type of material, grain size and orientation, the deformation of micro-cold extrusion, uneven mold filling, and unstable process parameters
[0007] 2. Superplastic micro-extrusion has special requirements for the workpiece materials used, and is only suitable for micro-extrusion with superplastic materials
[0008] 3. The heating of the workpiece in the microplastic forming system is indirect (embedding the thermocouple into the mold) or contact heating (oil bath, heating furnace), the process is complicated and the temperature is not easy to control
[0009] 4. Forming materials and processes are limited

Method used

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  • Micro-device warm extrusion molding method and device based on laser heating
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  • Micro-device warm extrusion molding method and device based on laser heating

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specific Embodiment approach 1

[0036] With reference to Figure 1, Figure 2, Figure 3, Figure 4 and Figure 5, the entire device consists of a laser heating system 1, an extrusion die 2, a pressure applying mechanism 4, a feeding mechanism 5, a three-dimensional precision workbench 6, a support 7 and a control system composition.

[0037] Figure 2 shows the laser heating system, the long-pulse infrared laser 1-1 passes through the expander 1-2, the adjustable diaphragm 1-3, the collimator 1-4, the light guide system 1-5, and the mirror 1-6 , 1-7, and short-focus objective lens 1-8, etc., the incident laser beam optical path system directly irradiates the blank, and uses the laser beam to perform quasi-static non-contact heating on the blank, and the laser beam forms a certain temperature distribution and gradient on the surface and inside of the blank , by changing the laser parameters such as laser pulse width, energy, beam diameter, and repetition frequency to adjust the temperature boundary conditions, so ...

specific Embodiment approach 2

[0045] If the dimensions of the blank to be formed are close to the diameter of the spot, or there is no special requirement for the temperature range of warm extrusion, because the heat loss is less in a short period of time, the mold temperature control component in the micro-temperature extrusion device based on laser heating 3. Electric heating Rod 3-1, thermocouple 3-2, PID feedback control circuit 3-3, thyristor 3-4, AC power supply 3-5, temperature controller 3-6 and control pole 3-7 can be omitted . The blank is directly heated by the laser heating system, and then the feed system 5 is used to feed the punch 2-7 in a short time. The combination of the loading system 4 and the feed system 5 realizes the extrusion action of the micro blank. The heat loss is very small, and micro-extrusion between room temperature and the recrystallization temperature of the material can be accomplished.

[0046] In summary, the laser heating-based warm extrusion forming method and devic...

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Abstract

The present invention relates to micro plastic forming technology and micro device manufacturing technology, and is especially micro device warm extruding process and apparatus based on laser heating. Long pulse infrared laser beam is applied onto quasi-static micro blank, so that the micro blank has temperature distribution suitable for micro warm extrusion. The warm extruding apparatus includes a heating laser system, an extruding mold, a pressure applying mechanism, a feeding mechanism, a 3D precise worktable, a support and a control system. The present invention realizes feeding and extruding by means of combining ultra magnetostriction micro displacement actuator and step motor, constant temperature heating mold with electric heating rod and temperature control module, and centering with 3D micro platform and image treating device, and controlling with the control system. The present invention has high forming performance.

Description

technical field [0001] The invention relates to the technical field of micro-device manufacturing and micro-plastic forming, in particular to a method and device for warm extrusion forming of micro-device based on laser heating, which is suitable for the volume forming of micro-metal devices, especially suitable for conventional micro-forming methods that are difficult to form Or forming materials that cannot be formed, such as titanium alloys, composite materials, etc., suitable for low-cost mass production of micro devices. Background of the invention [0002] Miniaturization enables MEMS to have better performance and functions in terms of precision, thermal deformation, vibration, and speed, and has broad development prospects in various application fields such as aerospace, medical and health, telecommunications electronics, precision instruments, and national defense. As micro-electro-mechanical systems gradually enter the research and development and practical stages ...

Claims

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Application Information

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IPC IPC(8): B21C23/00B21C29/00B21C31/00B21C25/02B21C23/21
Inventor 王匀许桢英孙日文张凯周明蔡兰杨昆董培龙
Owner JIANGSU UNIV
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