Rubber composition and sealing material for plasma treatment device

A technology of rubber composition and compound, which is applied in the field of rubber composition and sealing material for plasma treatment equipment, and achieves the effects of excellent plasma resistance, safe manufacturing, and good mold release

Active Publication Date: 2007-11-28
NIPPON VALQUA IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] The present invention solves the problems associated with the above-mentioned prior art, and an object of the present invention is to provide a vulcanizable reactive rubber composition before curing and a plasma treatment device obtained by vulcanization molding of the composition. Sealing material, the rubber composition can be produced at low cost, and it can be used continuously for a long time under high temperature in semiconductor manufacturing process, etc. It is not easy to adhere and fix with mating parts, and there is no problem of generation of debris for plasma processing equipment.

Method used

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  • Rubber composition and sealing material for plasma treatment device
  • Rubber composition and sealing material for plasma treatment device
  • Rubber composition and sealing material for plasma treatment device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0158] In "Daiel G912" which is a cross-linkable fluorine-containing rubber {peroxide-curable 3-component fluorine-containing copolymer = vinylidene fluoride (CF 2 =CH 2 ) / hexafluoropropylene (CF 3 -CF=CF 2 ) / tetrafluoroethylene (CF 2 = CF 2 ), fluorine content 71% by mass, Mooney viscosity ML 1+10 (100° C.) 76, manufactured by Daikish Kogyo Co., Ltd. }, mixed with "SIFEL8070A / B" (manufactured by Shin-Etsu Chemical Co., Ltd.), cross-linking agent {"パヘキサ25B", manufactured by NOF Corporation, 2,5-dimethyl-2,5-di(t- Butyl peroxy) hexane}, and a co-crosslinking agent {"TAIC" produced by Nippon Chemical Industry Co., Ltd., triallyl isocyanurate} were kneaded at a temperature of 60° C. for 1.0 hour using an open mixer, A rubber composition is obtained. This "SIFEL8070A / B" is a platinum group compound catalyst for an addition reaction containing a reactive fluorine-containing compound (b), a reactive organosilicon compound (c), and (b) and (c), and passes (b) and The reaction ...

Embodiment 2～5

[0164] In Example 1, except that the compounding ratio composition etc. were changed as shown in Table 1, it carried out similarly to Example 1, and obtained the molded body.

[0165] Under the above-mentioned test conditions, the normal physical properties, compression set (%), fixation test (N), and plasma resistance (weight loss rate (%), conditional shielding for 3 hours) shown in Table 1 were measured for the obtained molded body.

[0166] The results are shown in Table 1.

Embodiment 6

[0168] In Example 1, primary to secondary vulcanization was performed in the same manner as in Example 1, except that the secondary vulcanization conditions were changed from 200° C.×12 hours to 180° C.×12 hours as shown in Table 1, to obtain molded articles.

[0169] Under the above-mentioned test conditions, the normal physical properties, compression set (%), fixation test (N), and plasma resistance (weight loss rate (%), conditional shielding for 3 hours) shown in Table 1 were measured for the obtained molded body.

[0170] The results are shown in Table 1.

[0171] In Example 6, it can be seen from Table 1 that the unreacted component is "present", but it is only a very small amount, and the basic normal physical properties, compression set, fixation, and plasma resistance are all good, and there is no problem. The sealing material can be used without any problem if it is located close to piping or the like outside the wafer processing chamber. In addition, "exist" in th...

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PUM

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Abstract

A rubber composition which comprises (a) a crosslinkable fluororubber, (b) a reactive fluorine-containing compound (except the crosslinkable fluororubber (a)) having a divalent perfluoropolyether structure or divalent perfluoroalkylene structure and containing, in the terminal or a side chain thereof, two or more of alkenyl groups capable of conducting an addition reaction at least with a hydroxyl group in the following organic silicon compound (c), and (c) a reactive organic silicon compound having two or more of hydroxyl groups in the molecule thereof and being capable of conducting an addition reaction with an alkenyl group in the above compound (b), in such amounts wherein the total amount of (b) and (c) is 1 to 10 parts by weight relative to 100 parts by weight of said rubber (a), and further comprises a vulcanizing agent and optionally a co-crosslinking agent; and a sealing agent for a plasma treatment device, which is produced by subjecting said composition to the primary vulcanization and forming, and then subjecting unreacted components in the resultant formed article to the secondary vulcanization in a vacuum oven, to thereby reduce the amount of a gas which is an unreacted component and may be discharged. The above sealing agent for a plasma treatment device is less prone to cause the stick or adhesion onto a mating member, is free from the problem of generation of particles and from the contamination by a discharged gas, even in the case of continuous use for a long period of time at a high temperature, in particular, in a semiconductor manufacturing process or the like, and can be produced at a low cost.

Description

technical field [0001] The present invention relates to a reactive rubber composition before curing, and a sealing material for plasma (plasma) processing equipment, and particularly relates to a rubber composition that can be used especially at high temperatures for a long time in the semiconductor manufacturing process and is not easy to adhere to and solidify with mating parts. A reactive unvulcanized rubber composition before curing, which is a sealing material for a plasma processing device that can be produced at low cost without the problem of particle generation, and a plasma obtained by vulcanizing the composition. Sealing materials for body treatment devices. Background technique [0002] Conventionally, in the field of semiconductor manufacturing, perfluoroelastomer (FFKM) has been used as an elastomer material excellent in plasma resistance. [0003] However, perfluoroelastomers are very expensive. Therefore, cheaper fluoroelastomers (FKM) are often used instea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L27/12C08L83/05
CPCC08L27/12C08K5/0025C08K5/14C08K5/54C08L71/02C08L2666/14
Inventor 前田一之助筒井隆经赤松淑子
Owner NIPPON VALQUA IND LTD
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