Method for improving cleanliness of electron chemicals

An electronic chemical and cleanliness technology, applied in the field of electronic chemicals, can solve the problems of high-purity, clean solid chemical purification methods that have not been reported and researched.

Active Publication Date: 2007-12-05
南京美茵生命科技有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] A large number of domestic and foreign literature reports are about the preparation and purification methods of high-purity liquid chemicals that can be used in the microelectronics industry, but there are no reports and studies on the purification methods of high-purity and clean solid chemicals that can be used in the microelectronics industry information

Method used

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  • Method for improving cleanliness of electron chemicals

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Weigh the polyethyleneimine and separate it, select 200g of polyethyleneimine with n equal to 6-20, 1000ml of 15% sodium hydroxide, put it into the reaction bottle at 15°C, add 400g of carbon disulfide dropwise, and stir for 40 minutes to precipitate a solid. Filter, wash with deionized water and drain to obtain a solid product. The product was analyzed by infrared spectroscopy to be sodium polythiocarbamate.

Embodiment 2

[0024] Weigh 100 g of 2,3,4-trihydroxybenzophenone (the sum of the metal ion content is 200 mg / g), add 300 ml of acetone to dissolve, add 0.1 g of chelating agent sodium polythiocarbamate, stir at room temperature for 3 hours, and collect in the solution The various metal ions that exist form chelate precipitates, which are filtered through a primary or secondary ultra-microfiltration device, and the micro-filtration is completed under a pressure of 0.1-0.3 MPa or under vacuum to remove particles larger than 0.2un at the same time. The precipitate was removed, and the resulting solution was evaporated, cooled, and separated to obtain the product. After testing: copper, lead, zinc, manganese, magnesium, iron and other metal ions impurity content: ≤1.0×10 -10 , Non-metal impurity particles (≥0.2um, ≤0.5um) are ≤5 / mL.

Embodiment 3

[0026] Weigh 500g of 4'-chloro-3,4-dihydroxybenzophenone (total metal ion content 416.1mg / g), add 1500ml of toluene and heat up to dissolve it, add 3g of sodium polythiocarbamate, stir for 5 hours, and collect Various metal ions in the solution form chelate precipitates, and microfiltration is completed under 0.3MPa vacuum to remove particles larger than 0.2un at the same time. The precipitate was removed, and the resulting solution was evaporated, cooled, and separated to obtain the product. After testing: copper, lead, zinc, manganese, magnesium, iron and other metal ions impurity content: ≤1.0×10 -10 ; Non-metal impurity particles (≥0.2um, ≤0.5um) are ≤5 / mL.

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Abstract

The present invention discloses process of raising cleanliness of prepared electronic chemicals, and features that chelating agent is added into electronic chemical dissolved in organic solvent to capture various kinds of metal ions in the solution to form chelate precipitate and the solution is then filtered in ultrafilter to eliminate Cu, Pb, Zn and other metal ion impurities. Thus obtained high purity chemical has metal ion content not higher than 1.0x10<-10> and contains non-metal impurity grains in the size of 0.2-0.5 micron not more than 5 / ml. It reaches the requirement of SEMI-C12 standard, and is suitable for use in making printed circuit board.

Description

technical field [0001] The invention relates to the technical field of electronic chemicals in the chemical industry, in particular to a method for purifying high-purity, ultra-clean chemicals-polyhydroxybenzophenone series products. Background technique [0002] Electronic chemicals mainly include chemicals for integrated circuits and discrete devices, chemicals for printed circuit boards, chemicals for surface assembly, and chemicals for display devices. The quality of electronic chemicals directly affects the quality of electronic products. Therefore, there is a saying abroad that "one generation of materials, one generation of products". In other words, only with advanced materials can advanced products be produced. [0003] At present, the technology commonly reported and mastered at home and abroad is the processing method for liquid chemicals, (the technology generally used at present) such as: distillation and rectification can get 1.0×10 -12 Grade samples, but the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C45/78C07C49/83
Inventor 朱其军王家喜李昆鹏
Owner 南京美茵生命科技有限公司
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