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Making method for multi-crystal TFT array of active driven organic EL display screen

A production method and luminescent technology, which are applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve problems such as difficulty, high cost, and complex process of polysilicon thin-film transistor arrays, and achieve the effect of simple process and feasible operation

Inactive Publication Date: 2008-02-13
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The process of preparing polysilicon thin film transistor arrays is complex and costly. Usually, the production of polysilicon TFT arrays requires more than six photolithography operations. The method of array is a very practical work

Method used

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  • Making method for multi-crystal TFT array of active driven organic EL display screen
  • Making method for multi-crystal TFT array of active driven organic EL display screen
  • Making method for multi-crystal TFT array of active driven organic EL display screen

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Embodiment 1

[0071] (1) On the annealed 100mm Corning 1737 glass substrate 7, ultrasonic cleaning with organic solvents such as toluene, acetone, ethanol, cleaning, drying with a nitrogen gun, PECVD method (TEOS, Tetra-Ethyl -Ortho-Silicate) decomposition, the substrate temperature is 350°C) deposition of 500nm low temperature silicon oxide (LTO: low temperature oxide) buffer layer 5 to block impurities in the glass;

[0072] (2) PECVD method deposits 60nm intrinsic amorphous silicon (a-Si) layer 14, substrate temperature 200℃, background vacuum 2×10 -4 pa, reaction chamber pressure 80pa, SiH 4 Flow rate 40sccm;

[0073] (3) PECVD method to deposit 60nm SiN x Insulation layer 15, using SiH 4 And NH 3 Mixed gas, substrate temperature 270℃, reaction chamber pressure 30Pa;

[0074] (4) Sputtering 30 induces the metal (Ni) layer 16, the substrate temperature is 130°C, and the background vacuum is 2×10 -4 Pa, the pressure of the reaction chamber during sputtering is 0.1 Pa; then, the a-Si amorphou...

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Abstract

The invention belongs to flat panel display driving technique field and in particular relates to a method for manufacturing polysilicon TFT array of the active driving organic electroluminescent display panel. Firstly, a polysilicon film is manufactured and photoengraved to form a TFT area, a capacitance lower polar plate area, an anode area of the organic electroluminescent diode and a heavy doped polysilicon connection wire. A grid insulsting layer is manufactured and is photoengraved into pierced holes for connecting polysilicon with metal. The metal is then sputtered and photoengraved to form a metal grid and a metal connection wire. At the same time a doping window is opened in the capacitance lower polar plate doping area and then autoregistration is used to carry out the doping process and to carry out a heavy(BH3)P doping process on the source and drain electrode of TFT, polysilicon short stiring intereconnection area, and the areas needing doping in the capacitance lower polar plate. Finally, an insulating layer, a luminescent window, and an OLED luminescent layer are manufactured. The whole technique processes of method of the invention only need 4 photoengraving and reduce 2 photoengraving processes compared with the common Poly-Si TFT technique process, and has the good effects of having simple techniques.

Description

Technical field [0001] The invention belongs to the technical field of flat panel display driving, and in particular relates to a method for actively driving a polysilicon (Poly-Si) TFT array in an organic electroluminescent display (OLED). Background technique [0002] Organic electroluminescent displays (OLEDs) have become flat panel displays in recent years with their superior performance such as low power consumption, ultra-light and thin, bright colors, wide viewing angles, self-luminous, low cost, high brightness, flexibility, and ability to work normally under low temperature conditions. The focus of attention in the technical field. [0003] Organic light-emitting display screens can be divided into passive (Passive Matrix, PMOLED) and active (Active Matrix, AMOLED) according to their different driving methods. In addition to the light-emitting material itself, each pixel of the active drive display screen integrates multiple thin film transistors (TFT) on its substrate t...

Claims

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Application Information

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IPC IPC(8): H01L21/84
Inventor 张彤王丽杰刘雪强李传南刘式墉
Owner JILIN UNIV
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