Method for manufacturing diamond-type metal nanometer particle array structure

A metal nanoparticle and array structure technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as low efficiency, limited area of ​​graphics produced by electron beam or ion beam lithography, and inability to realize batch production, etc., to achieve Large area and high, high-sensitivity effects

Inactive Publication Date: 2008-03-19
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In the production of nano-metal structures that excite localized surface plasmons, the methods commonly used at home and abroad include electron beam lithography, ion beam lithography and self-assembly technology, but the area of ​​electron beam or ion beam lithography is limited. The efficiency is very low and mass production cannot be realized

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  • Method for manufacturing diamond-type metal nanometer particle array structure

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Embodiment 1

[0023] Embodiment 1 is an array-type rhombic metal nano-array structure with a characteristic size of less than 170 nanometers fabricated by the method of the present invention.

[0024] (1) First select a finely polished silicate glass sheet with a size of φ25mm×2mm as the substrate, and use a vacuum coating machine to deposit a layer of 5nm chromium film on the surface of the glass sheet;

[0025] (2) 1ml of monodisperse polystyrene nanosphere hydrosol with a diameter of 500nm and a concentration of 2% and 0.2ml of monodisperse polystyrene nanosphere hydrosol with a diameter of 200nm and a concentration of 1% are mixed with ultrasonic waves for subsequent use;

[0026] (3) Put the chrome-plated glass substrate into 98% concentrated sulfuric acid and hydrogen peroxide H 2 SO 4 : 30%H 2 o 2 Heat it to 80℃~120℃ for 30~60 minutes in the washing solution prepared by 3~4:1 to remove impurities, then rinse repeatedly, and then put in the solution NH3:H composed of ammonia water,...

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Abstract

Fabrication method of rhombic metal nanoparticle array structure: (1) select finely polished silicate glass as the substrate, deposit a layer of chromium with a thickness of several nanometers on the glass surface; The polystyrene nanospheres are mixed in proportion; (3) the chrome-plated glass plate is hydrophilized by chemical method; (4) a layer of mixed polystyrene nanospheres is self-assembled on the surface of the chrome-plated glass plate after the hydrophilization treatment (5) adopt reactive ion etching machine (RIE) to etch the self-assembled layer of polystyrene nanospheres made, and completely etch away the small polystyrene nanospheres in diameter; (6) use the etched polystyrene nanospheres The self-assembled layer of polystyrene nanospheres is used as a mold, and the gap between balls is filled with metal; (7) the self-assembled layer of polystyrene nanospheres is removed to obtain a diamond-shaped metal nanoparticle array structure. The arrayed metal nano-array structure produced by the invention can be applied to the field of biosensing, and realize multi-channel rapid detection of various biomolecules.

Description

technical field [0001] The invention is a new method for making rhombic metal nano-array structure, and the structure is made by reactive ion etching RIE technology combined with nano-sphere self-assembly technology. Background technique [0002] In recent years, with the development of micro-nano processing technology and nanomaterials, the electromagnetic properties of nano-metal structures are receiving more and more attention. The interaction between light and nano-metal structures has produced a series of new physical phenomena. When the electromagnetic wave is incident on the surface of the nano-metal array structure, the generated local surface plasmons (Local Surface Plasmons) will make the electromagnetic energy concentrated and enhanced violently. Based on these characteristics, localized surface plasmon LSPs have broad application prospects in energy storage, conversion, sensing and other fields. Biosensors based on this principle have faster detection speed and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00
Inventor 罗先刚李飞邓启凌杜春雷
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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