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Vacuum multi sphere ion film coating machine intelligent integrated controller

A multi-arc ion, coating machine technology, applied in the direction of computer control, general control system, control/adjustment system, etc., can solve the problems of coarse film structure, deterioration of performance, decrease of deposition rate, etc., to achieve process stability and reduce labor. Strength, effect of ensuring coating quality and equipment safety

Inactive Publication Date: 2008-05-21
湖南冶金职业技术学院
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Problems solved by technology

The substrate temperature is an important factor affecting the structure of the ion plating film. Different substrate temperatures can grow thin film coatings with completely different grain shapes, sizes and structures. An increase in the substrate temperature will increase the bonding force between the film and the substrate and improve the coating. structure and performance, but if the temperature is too high, the deposition rate will decrease, and even the structure of the film layer will be coarse and the performance will be deteriorated

Method used

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  • Vacuum multi sphere ion film coating machine intelligent integrated controller
  • Vacuum multi sphere ion film coating machine intelligent integrated controller

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Embodiment Construction

[0013] In the schematic diagram of the typical embodiment shown in Figure 2, the single-chip microcomputer U1 selects the C8051F020 mixed-signal microcontroller with a high-speed 8051 microcontroller as the core, and integrates 64KB of ISP Flash ROM and 4352 bytes of SRAM on the chip, with On-chip JTAG debugging, on-chip programmable oscillator, on-chip power-on reset function, 64-bit I / O ports, one I 2 C interface, one SPI interface and two UART serial interfaces; the touch display unit U2 uses MT500 touch screen, and the touch screen communicates with the microcontroller U1 through the RS-485 bus; the A / D conversion unit U3 consists of two 12-bit resolution, multi-analog There are 22 analog input channels in total. DATAI, DATAO, and CLOCK of TLC2543 are connected in parallel to the SPI serial port of single-chip U1, and each CS and EOC signal are respectively connected to the I / O port of single-chip U1. After connecting, the 4~20mA current signal sent by different transmitte...

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Abstract

An intelligent integrated controller of a vacuum multi-arc ion plating machine comprises a singlechip, a touch display unit, an A / D conversion unit, a D / A conversion unit, an amplifier unit, a drive unit, a relay unit, and a switch value input unit. With the controller, an operator can input a prepared plating production technique via the touch display, and then the controller realizes the intelligent integrated control of the plating machine by controlling the vacuum pressure, the electric arc source current, the plating chamber temperature, the workpiece negative bias, and the aeration flow of the vacuum multi-arc ion plating machine and controlling the a vacuum pump, a solenoid valve and other devices according to the input technique. Thus, the vacuum plating technique is stabilized to guarantee the plating quality and the equipment safety.

Description

technical field [0001] The invention relates to an intelligent controller of a vacuum ion coating machine, in particular to an intelligent integrated controller of a vacuum multi-arc ion coating machine. Background technique [0002] In the existing products, there is no intelligent controller with a single chip microcomputer for the integrated control of vacuum pressure, arc source current, workpiece temperature, workpiece negative bias voltage and gas flow of vacuum multi-arc ion coating machine. At present, the control scheme of vacuum multi-arc ion coating machine widely used in China is that vacuum pressure, arc source current, workpiece temperature, workpiece negative bias voltage and gas filling flow are independently controlled by controller or manually controlled, such as using a temperature controller to control the coating chamber. And the temperature of the workpiece, the vacuum pressure of the coating chamber is controlled by a pressure gauge, while the arc sour...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/52C23C16/50G05B15/02
Inventor 凌云黄浪尘
Owner 湖南冶金职业技术学院
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