Vacuum multi sphere ion film coating machine intelligent integrated controller

Abstract

An intelligent integrated controller of a vacuum multi-arc ion plating machine comprises a singlechip, a touch display unit, an A / D conversion unit, a D / A conversion unit, an amplifier unit, a drive unit, a relay unit, and a switch value input unit. With the controller, an operator can input a prepared plating production technique via the touch display, and then the controller realizes the intelligent integrated control of the plating machine by controlling the vacuum pressure, the electric arc source current, the plating chamber temperature, the workpiece negative bias, and the aeration flow of the vacuum multi-arc ion plating machine and controlling the a vacuum pump, a solenoid valve and other devices according to the input technique. Thus, the vacuum plating technique is stabilized to guarantee the plating quality and the equipment safety.

Description

technical field [0001] The invention relates to an intelligent controller of a vacuum ion coating machine, in particular to an intelligent integrated controller of a vacuum multi-arc ion coating machine. Background technique [0002] In the existing products, there is no intelligent controller with a single chip microcomputer for the integrated control of vacuum pressure, arc source current, workpiece temperature, workpiece negative bias voltage and gas flow of vacuum multi-arc ion coating machine. At present, the control scheme of vacuum multi-arc ion coating machine widely used in China is that vacuum pressure, arc source current, workpiece temperature, workpiece negative bias voltage and gas filling flow are independently controlled by controller or manually controlled, such as using a temperature controller to control the coating chamber. And the temperature of the workpiece, the vacuum pressure of the coating chamber is controlled by a pressure gauge, while the arc sour...

AI Technical Summary

Problems solved by technology

The substrate temperature is an important factor affecting the structure of the ion plating film. Different substrate temperatures can grow thin film coatings with completely different grain shapes, sizes and structures. An increase in the substrate temperature will increase the bonding force between the film and the substrate and improve the coating. structure and performance, but if the temperature is too high, the deposition rate will decrease, and even the structure of the film layer will be coarse and the performance will be deteriorated

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