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Ultraviolet electricity scaling hot-dispelling electric detector

A pyroelectric detector, pyroelectric technology, applied in the direction of electrical radiation detectors, etc., can solve the problems of no detector, unpractical application, unsuitability, etc., to enhance photoelectric equivalence, thickness and uniform performance Accurate control, fast response effect

Inactive Publication Date: 2008-08-27
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

In the research and application of ultraviolet detectors, a very critical problem is that the ultraviolet detectors must be accurately calibrated for ultraviolet testing, and detectors that have not been calibrated cannot be used in practical applications
In the calibration test of the ultraviolet detector, the key issue is the calibration measurement of the ultraviolet radiation power. In order to ensure the accuracy of the measurement results, the selection of the ultraviolet absorbing conductive film layer and the insulating shielding layer in the electrical calibration pyroelectric detector is a key issue, the current infrared radiation electrical calibration pyroelectric detector is not suitable for ultraviolet radiation electrical calibration

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  • Ultraviolet electricity scaling hot-dispelling electric detector
  • Ultraviolet electricity scaling hot-dispelling electric detector
  • Ultraviolet electricity scaling hot-dispelling electric detector

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Embodiment Construction

[0018] Taking the lithium tantalate pyroelectric detector as an example below, the specific implementation of the present invention will be further described in detail in conjunction with the accompanying drawings:

[0019] First cut the lithium tantalate crystal polarized along the direction into 14mm×18mm wafers with a thickness of 0.7mm, grind and polish the first side of the wafer, then grind the second side and polish to 80μm, after equal thickness correction , the uniform thickness deviation of the entire sheet is ≤±1μm. It was etched with 40% analytical pure HF at 95°C for 1 hour, and then cleaned.

[0020] The Cr / Au signal electrode layer 6 of 10mm * 10mm is evaporated in the middle of the lower surface of the lithium tantalate wafer 5, and the Cr / Au upper electrode layer 4 is evaporated on the upper surface of the entire lithium tantalate wafer. The sheet resistance of the electrode layers 4 and 6 is less than 5Ω / □. Then, a layer of polyimide shielding layer 3 is ...

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Abstract

The invention discloses an ultraviolet radiation electric calibration pyroelectric detector, which comprises a chip hanging up and encapsulated in a metallic tube case. The chip consists of a pyroelectric wafer; a metallic upper electrode layer, a polyimide insulation shielding layer, a multi-wall carbon nano-tube film capable of not only absorbing ultraviolet radiation but also being heated through conduction, which are deposited on the upper surface of the pyroelectric wafer in turn; and a signal electrode layer which is deposited on the lower surface of the pyroelectric wafer. The ultraviolet radiation electric calibration pyroelectric detector has the greatest advantage of adopting the multi-wall carbon nano-tube as an ultraviolet conduction and absorption film. Compared with the prior art adopting a black gold conduction and absorption film, the ultraviolet radiation electric calibration pyroelectric detector can absorb the ultraviolet radiation with higher efficiency and better heat conducting property, strengthen the photoelectric equivalence, and reduce calibration errors with stable performance of the multi-wall carbon nano-tube film. The ultraviolet radiation electric calibration pyroelectric detector adopts the insulation shielding layer made of polyimide, thereby bringing about compatibility with the micro-electronic technique, accurate control on the thickness and evenness of the film, and good heat stability.

Description

technical field [0001] The invention relates to an electrical calibration pyroelectric detector, in particular to a pyroelectric detector used for electrical calibration of ultraviolet radiation power. Background technique [0002] Electrically calibrated pyroelectric radiometer (ECPR for short) is an electrical substitution radiometer that works at room temperature. ECPR was first proposed by American NBS (the predecessor of NIST) Robert J.Phelan in the early 1970s. International authoritative metrology laboratories such as American NIST and German PTB are carrying out related research work. In 1979, the Shanghai Institute of Technical Physics of the Chinese Academy of Sciences carried out ECPR research work. At that time, the relevant patents applied for were "electrically corrected pyroelectric detectors", application number: 87200203.9; Electric detector", application number: 85205071. The above-mentioned ECPR research work is mainly aimed at the calibration of infrare...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/10
Inventor 邵秀梅于月华丁洁莹方家熊
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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