Method for preparing solid lubrication film on space vehicle movable part
A space vehicle and solid lubrication technology, applied in the direction of liquid cleaning methods, chemical instruments and methods, cleaning methods and utensils, etc., can solve the problems of harsh storage and assembly conditions, high humidity environment failure, low surface hardness, etc., to achieve Enhance environmental adaptability, good applicability, and improve moisture-proof performance
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Embodiment 1
[0018] (1) Clean the workpiece to be coated with solution. First, use petroleum ether solution for ultrasonic cleaning for 5 minutes, then use acetone solution for ultrasonic cleaning for 5 minutes, and finally use absolute ethanol solution for ultrasonic cleaning for 5 minutes.
[0019] (2) Put the workpiece into the deposition chamber, introduce Ar, and glow discharge. During the discharge process, the current of the unbalanced coil is controlled at 3A, the bias voltage of the workpiece table is 600V, and the flow rate of the working gas is 700sccm to ensure that the glow discharge is at 130℃~140℃ next.
[0020] (3) After the glow discharge is completed, the workpiece is plated with an intermediate layer process, the titanium target is powered, and the titanium atoms are sputtered from the titanium target and deposited on the surface of the workpiece. The deposition time is 10 minutes, and the deposition thickness is 300nm. The titanium target The power is 3Kw, the bias volt...
Embodiment 2
[0023] (1) Clean the workpiece to be coated with solution. First, use petroleum ether solution for ultrasonic cleaning for 5 minutes, then use acetone solution for ultrasonic cleaning for 5 minutes, and finally use absolute ethanol solution for ultrasonic cleaning for 5 minutes.
[0024] (2) Put the workpiece into the deposition chamber, introduce Ar, and glow discharge. During the discharge process, the current of the unbalanced coil is controlled at 3A, the bias voltage of the workpiece table is 700V, and the flow rate of the working gas is 800sccm to ensure that the glow discharge is at 130℃~140℃ next.
[0025] (3) After the glow discharge is completed, the workpiece is plated with an intermediate layer process, the titanium target is powered, and the titanium atoms are sputtered from the titanium target and deposited on the surface of the workpiece. The deposition time is 15min, and the deposition thickness is 300nm. The titanium target The power is 4Kw, and the working ga...
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