Three-cavity multichannel optical spectrum step type integrated optical filter
A multi-channel, step-type technology, applied in the field of three-cavity multi-channel spectral step-type integrated filters, achieves the effects of good channel spectral squareness, accurate positioning and improved yield.
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[0015] Below in conjunction with accompanying drawing, the present invention will be further described: according to strength requirement, select the gem piece that size is 20mm * 10mm as base. Silicon (Si) and silicon dioxide (SiO 2 ) as high refractive index materials (n H ) and low refractive index materials (n L ), the number of channels formed when n=4 is N=2 n =16, the geometric size of each channel is 1mm×6mm, the mask used is as follows figure 2 shown.
[0016] Take the center wavelength λ 0 = 1.25 μm, the process is as follows: (1) prepare the film system (L H)^22.37L on the substrate; (2) etch the first resonant cavity with an ion beam etching machine; (3) continue to etch Prepare (H L)^4 H 2.37L film system on the sample; (4) etch the second resonant cavity; (5) continue to prepare (HL)^4 H2.37L film system; (6) etch the third resonant cavity; (7) Prepare the HLH film system to complete the integrated optical filter.
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