Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor

A fluidized bed reactor and polysilicon technology, applied in chemical instruments and methods, from chemically reactive gases, polycrystalline material growth, etc., can solve the problem of separating the heating zone from the reactor, deposition on the wall of the heating zone, silicon-containing Reaction gas back-mixing and other problems, to achieve the effect of great flexibility, silicon deposition inhibition, and reduce overall energy consumption

Inactive Publication Date: 2008-12-10
TSINGHUA UNIV
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Problems solved by technology

[0010] Although the technical solutions disclosed in US5,382,412 and US6,007,869 provide a heating zone and a reaction zone, they do not effectively separate the heating zone and the reactor. Due to the strong back-mixing characteristics of the fluidized bed, the reaction zone Part of the silicon-containing reaction gas is mixed back into the heating zone, resulting in deposition on the wall of the heating zone
In addition, there is a strong heat exchange between the particles and the inner wall of the reactor in the heating zone, so that the temperature of the inner wall of the reaction zone is close to the temperature of the silicon particles, which will also lead to the deposition of silicon-containing reactors on the inner wall of the reaction zone

Method used

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  • Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor

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Embodiment Construction

[0032] The specific implementation manner of preparing high-purity granular polysilicon particles by using a fluidized bed reactor according to a preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0033] figure 1 Schematic diagram of the structure of the embodiment of the fluidized bed reactor provided by the present invention. In this embodiment, the fluidized bed reactor comprises a reaction zone cylinder wall 5, a perforated guide cylinder 6 coaxial with the reactor cylinder wall and a reaction zone 7 inside thereof, and the reaction zone located at the lower part of the reaction zone 7 is fluidized. Gas distributor 2 and fluidization gas inlet 1 in the reaction zone, polysilicon particle product outlet 3 connected to the lower part of the perforated draft tube, expansion section 8 located at the upper part of the reaction zone, silicon seed storage tank 10 located at the upper part of the expanded ...

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Abstract

The invention provides a method for preparing high-purity polysilicon particles with a fluidized bed and a fluidized bed reactor, the heating zone and the reaction zone of the fluidized bed are separated from each other in structure. The method for preparing high-purity polysilicon particles by a fluidized bed comprises the steps as follows: a) a fluidizing gas without silicon is inlet to the heating zone of the reactor to lead the polysilicon particles in the heating zone to be a fluidized state, the polysilicon particles are heated by a heating device; b): the heated polysilicon particles are delivered to the reaction zone to which the gas with silicon is inlet, the gas with silicon carries out thermal decomposition or reduction at the surface of the polysilicon particles, thus simple substance silicon is produced and settled on the surface of particles; c): part of polysilicon particles with 0.1-10mm particle size are taken from the lower part of the reactor as the products; d): the fine polysilicon particles which have the diameter of 0.01-1.0mm and are taken as the seed crystal are added to the upper part of the reactor to maintain the quantity of the polysilicon particles in the reactor. The method and the fluidized bed reactor of the invention have the advantages that the wall of the reactor has less silicon deposition; the reactor can operate continuously for a long period with low energy consumption, etc.

Description

technical field [0001] The invention relates to a method suitable for preparing high-purity polysilicon particles and a fluidized bed reactor, belonging to the field of chemical technology and equipment. Background technique [0002] Polycrystalline silicon is the raw material for preparing monocrystalline silicon and solar cells, and is the foundation of the global electronics industry and photovoltaic industry. According to the purity of silicon content, it can be divided into solar grade silicon (6N) and electronic grade silicon (11N). In the past, silicon materials for solar cells mainly came from off-grade electronic-grade silicon, monocrystalline silicon head and tail materials, pot bottom materials, etc., and the annual supply was very small. With the rapid development of the photovoltaic industry, the demand for polysilicon in solar cells is increasing rapidly. Therefore, countries all over the world are competing to develop new preparation technologies and process...

Claims

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Application Information

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IPC IPC(8): C01B33/03C30B29/06C30B25/00C30B28/14B01J8/24
Inventor 王铁峰魏飞王金福朱杰
Owner TSINGHUA UNIV
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