Antistatic TFT substrate and processing technique thereof

Abstract

A TFT base-plate belongs to the glass technical field, in particular to the processing technical field of a TFT base-plate which is used for a display, wherein an indium-tin oxide film layer with the antistatic function is arranged on the TFT base-plate, the film plating material of the indium-tin oxide film layer with the antistatic function is indium-tin oxide SnO2, the proportion of the indium and the tin is 98:2, the transmittance is more than 88 percent, the sheet resistance is between 600-1200 ohm / square,the thickness of the indium-tin oxide film layer with the antistatic function is 80+ / -20, and the sheet resistance is between 700-1150 ohm / square. The invention adopts the method of low temperature, multi-target and discontinuous sputtering to plate the indium-tin oxide film layer with high transmittance and high sheet resistance on the TFT base-plate, namely ITO film, since the resistance value of the ITO film is big, thereby the TFT base-plate has good antistatic function after the film is plated, and dust is not easily absorbed, simultaneously, the breaking of the TFT base-plate during the film plating and the aging of the TDT base-plate after the film plating are prevented.

Description

Technical field: [0001] The invention relates to a TFT substrate, which belongs to the technical field of glass, in particular to the technical field of processing TFT substrates for displays. Background technique: [0002] At present, TFT substrates have been widely used for liquid crystal display panels, because TFT-type displays have relatively high contrast, fast response speed, and wide viewing angles. However, since the traditional TFT substrate is not treated with anti-static treatment, it is easy to absorb dust in the air when it is processed into a display, and the surface is easily dirty, which affects the clarity of the display panel. In addition, because the TFT substrate is ultra-thin glass, it is fragile. Generally, in order to conduct anti-static treatment on glass, vacuum coating is mainly used. The traditional vacuum coating technology is coated at a higher temperature, that is, the temperature of the coating exceeds 100 ℃, and the coating is performed at a high ...

AI Technical Summary

Problems solved by technology

However, due to the lack of anti-static treatment on the traditional TFT substrate, it is easy to absorb dust in the air when it is processed into a display, and the surface is easy to get dirty, which affects the clarity of the display panel.

In addition, since the TFT substrate is an ultra-thin glass, it is fragile

Usually, in order to carry out anti-static treatment on glass, the method of vacuum coating is mainly used. The traditional vacuum coating technology is coated at a higher temperature, that is, the temperature of the coating exceeds 100 ° C, and the coating at high temperature, due to the TFT The thin and brittle substrate will not only cause the TFT substrate to break and leak, but also cause the TFT substrate to age after coating, which will reduce the service life of the display and affect the overall quality of the display.