Double-frequency tunable magnetic resonance artificial compound material based on asymmetric metal grating structure

Abstract

The invention provides a double-frequency adjustable magnetic resonance artificial composite material based on a non-symmetric metal grating structure, which is characterized in that the material is produced through the following steps: selecting a quartz substrate and polishing the surface of the quartz substrate; evaporating a SiO2 film on the surface of the quartz substrate; evaporating a chromium film on the surface of the SiO2 film; coating a photoresist layer on the chromium film; preparing a medium grating structure on the photoresist by electron beam lithography method; eroding and exposing the chromium film by using the photoresist as a mask by wet etching technology; etching the medium grating structure on the SiO2 film by using the chromium film as a mask by dry etching technology, and removing the chromium film; laterally depositing a metal layer with the thickness of h on one side of the SiO2 grating structure by lateral vacuum deposition technology, similarly, depositing a metal layer with the same thickness on the other side of the SiO2 grating structure, thereby forming an n-shaped metal structure with the top thickness of 2h and the side wall width of h to complete the production of the double-frequency adjustable magnetic resonance artificial composite material based on the non-symmetric metal grating structure. The method has the characteristics of simple and convenient production, small monolayer consumption, monolayer normal incidence and double frequency, and has revelatory significance and great application prospect in magnetic resonance, near-field optics, camouflage materials and other fields.

Description

technical field [0001] The invention relates to an artificial composite structural material that utilizes the electromagnetic properties of a "п"-shaped metal structure to achieve a large range of continuous negative magnetic permeability covering near-infrared and visible light frequency bands, and a passband characteristic in the negative magnetic permeability region. design and production. technical background [0002] The effective magnetic permeability is an important parameter for the interaction between the material and the external electromagnetic field. The artificial composite material with negative magnetic permeability in the near-infrared band, especially in the visible light band, utilizes periodically arranged nanometer-scale non-magnetic unit structures to form a magnetic field with external excitation electromagnetic waves. Resonance can realize the adjustment of the effective magnetic permeability of the material, and even obtain a negative effective magnet...

AI Technical Summary

Problems solved by technology

[0004] The problem to be solved by the present invention is to propose a dual-frequency adjustable magnetic resonance artificial composite material based on an asymmetric metal grating structure in view of the shortcomings of the existing artificial composite materials for magnetic resonance; this material can utilize "п" Shaped metal structure and the electromagnetic properties of the adjacent metal side walls of the two "п" shaped metal structures, to achieve a wide range of continuous negative magnetic permeability covering the near-infrared and visible light frequency bands, and at the same time realize the negative magnetic permeability in the negative magnetic permeability region Passband characteristics

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