Nano-silicon air-sensitive material and gas sensor

A technology of gas-sensitive materials and gas-sensitive elements, which is applied in the field of new material technology and nanomaterials, can solve the problems that it is difficult to achieve ultra-micro-quantity rapid detection, and the sensitivity and selectivity cannot meet the requirements of ultra-micro-quantity rapid detection.

Inactive Publication Date: 2009-04-29
BEIJING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the main problem of traditional gas sensors is that the characteristics of sensitivity and selectivity cannot meet the requirements of ultra-trace rapid detection, but it is difficult to achieve the level of ultra-trace rapid detection with conventional gas sensitive materials.

Method used

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  • Nano-silicon air-sensitive material and gas sensor

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 2

[0028] On the surface of the cleaned silicon chip, deposit a 30nm thick Ag film by electroless plating, then immerse the sample that is deposited with the silver film in a closed container kettle containing hydrofluoric acid and hydrogen peroxide mixed solution (the concentration of hydrofluoric acid and hydrogen peroxide The concentrations are respectively 4.0 mol / L and 0.2 mol / L) and treated for 30 minutes to obtain a large-area nano-silicon material. Metal ohmic electrodes at a certain distance are deposited on the surface of the nano-silicon material, and the outer leads can be drawn out to become a simple gas sensor.

specific Embodiment approach 3

[0029] The cleaned silicon wafer is directly immersed in a closed container kettle containing a mixed solution of hydrofluoric acid and silver nitrate (concentrations of hydrofluoric acid and silver nitrate are respectively 4.0mol / L and 0.02mol / L) and treated for 30 minutes to obtain Large-area nano-silicon material. Metal ohmic electrodes at a certain distance are deposited on the surface of the nano-silicon material, and the outer leads can be drawn out to become a simple gas sensor.

specific Embodiment approach 4

[0030] On the surface of the cleaned silicon chip, deposit a 30nm thick Ag film by electroless plating, then immerse the sample that is deposited with the silver film in a closed container kettle containing hydrofluoric acid and hydrogen peroxide mixed solution (the concentration of hydrofluoric acid and hydrogen peroxide The concentrations are respectively 4.0mol / L and 0.2mol / L) and treated for 40 minutes to obtain a large-area nano-silicon material. Metal ohmic electrodes are deposited on the surface and back of the nano-silicon material, and a simple gas sensor can be formed after the outer lead is drawn out.

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Abstract

The invention discloses a nano-silicon gas sensitive material and a gas sensitive element belonging to the filed of new material technology and nano materials, and is characterized in that the gas sensitive material based on nano-silicon and the gas sensitive element sensitive to nitrogen-oxygen compound gases such as nitric oxide, nitrogen dioxide and the like and gases such as ammonia gas and the like can be prepared through preparing the nano-silicon by erosion of metallic catalyst silicon and adding proper catalyst such as platinum (or gold) and the like. The gas sensitive element has the advantages of good selectivity, good temperature resistance and moisture resistance, good stability, long service life, no environment pollution, stable process, good repeatability, and convenient batch production.

Description

technical field [0001] The invention relates to a nano-silicon gas-sensitive material and a gas-sensitive element, belonging to the field of new material technology and nanometer materials. Background technique [0002] The detection and monitoring of various gases, especially flammable gases and toxic gases, has become an urgent problem to be solved. The research on nano gas-sensitive materials is very important for improving the sensitivity, selectivity and long-term stability of gas-sensitive materials, as well as how to reduce the working temperature and shorten the Aspects such as response temperature time play a major role. The research status of nanometer gas-sensing materials for hydrogen, hydrogen sulfide, hydrocarbons, nitrogen oxides, ethanol, acetone and other gases is studied, and the development trend is prospected. [0003] Due to the urgent needs of industrial production and environmental detection, the research and application development of gas sensors hav...

Claims

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Application Information

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IPC IPC(8): G01N27/00
Inventor 彭奎庆王新
Owner BEIJING NORMAL UNIVERSITY
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