DLC infrared anti-refiection protective film and method for producing the same

An anti-reflection and protective film technology, applied in sputtering plating, ion implantation plating, coating, etc., can solve the problem of narrow transmission band and achieve less interference, anti-reflection effect and good wear and corrosion resistance , easy to control effects
CN101464528AInactive Publication Date: 2009-06-24SICHUAN UNIV
2 Cites 43 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SICHUAN UNIV
Publication Date
2009-06-24
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to a DLC infrared anti-reflection protective film and a preparation method thereof. The infrared anti-reflection protective film has the anti-reflection effect at a wider infrared band and simultaneously ensures that an optical element after being filmed has the capacity of abrasion and corrosion resistance. The infrared anti-reflection protective film adopts the structure that a double-layer film is prepared on ZnSe(1); and the refractive index n1 of a first layer of high refractive index film is 1.8 to 2.5, and the thickness d1 thereof is within the scope of about 0.25 Lambada / n1; the refractive index n2 of a second layer of high refractive index film is 0.1 less than that of the first layer of high refractive index film at least, and the thickness d2 thereof is within the scope of about 0.25 Lambada / n (wherein, Lambada is the anti-reflection central wavelength of the infrared anti-reflection film). The preparation method comprises the step of depositing diamond like carbon (DLC) anti-reflection film on double sides or single side of a transparent basal body by adopting the unbalanced intermediate frequency or radio frequency magnetic control sputtering method and taking graphite as a target source, and hydrocarbon and Ar mixed gas or pure Ar as auxiliary discharge gas. Two layers of DLC films with different refractive indexes are prepared through controlling depositing parameters; and the thickness required for each film is obtained through controlling the time. The method has the advantages of convenient control of the depositing parameters of the films, less interference among the depositing parameters, and better anti-reflection effect and abrasion and corrosion resistance.
Need to check novelty before this filing date? Find Prior Art

Description

1. Technical field

[0001] The invention relates to a DLC infrared anti-reflection protective film and a preparation method thereof. The infrared anti-reflection protective film is formed on the incident surface or the incident surface and the exit surface of the infrared transparent optical element by the unbalanced magnetron sputtering method, so that the amount of reflected light on the incident surface is reduced. The infrared band has a good anti-reflection effect, and the film layer has the effect of wear resistance and corrosion resistance. 2. Background technology

[0002] Anti-reflective coatings have been widely used in the optical field to reduce the reflection of light from the air and the boundaries of optical components. Camera lenses, liquid crystal displays, automotive windows, solar cells, infrared detection, etc. are examples of such applications.

[0003] The infrared window is the pre-protection component of the infrared detection of the detector, etc. Z...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More