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Method for coating colloidal sol-gel film on surface of porous substrate

A surface coating, substrate surface technology, applied in chemical instruments and methods, membrane technology, semi-permeable membrane separation, etc., can solve the problems of increasing process steps, increasing costs, easily destroying inorganic thin films, and achieving the effect of improving separation efficiency

Inactive Publication Date: 2011-07-27
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the organic layer as a support must be removed through a post-processing process such as sintering or plasma treatment. This process is easy to damage the inorganic film and cause defects such as cracks in the inorganic film.
Moreover, the porous substrate is filled with organic matter, and then the organic support layer is removed by a post-processing method, which increases the process steps, increases the process complexity, and thus increases the cost

Method used

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  • Method for coating colloidal sol-gel film on surface of porous substrate
  • Method for coating colloidal sol-gel film on surface of porous substrate
  • Method for coating colloidal sol-gel film on surface of porous substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] 1. Anodized Al with plastic edge ring 2 o 3 The substrate (Anodisc25, pore size 20nm) is placed on the Si support pad;

[0033] 2. Heat on the electric heating plate to melt the plastic edge ring, and through adhesion, the periphery is sealed with anodized Al 2 o 3 The substrate is on the Si wafer support pad, only Al is exposed 2 o 3 Substrate single sided.

[0034] 3. By sealing the porous substrate on one side and exposing the other side of the porous substrate, coating the sol on the exposed surface of the porous substrate, the air in the pores of the substrate is compressed to form an air cushion, which prevents the sol liquid from flowing into the hole, thus forming on the surface of the substrate. Homogeneous sol-gel film; where:

[0035] Preparation of sol: Dilute 10 g of ethyl orthosilicate in 30 g of ethanol, add 4 g of aqueous hydrochloric acid (0.1 mol / l), and stir at 60° C. for 1 h. Then add ethanol as solvent C 16 h 33 (OCH 2 CH 2 ) 10 OH surfa...

Embodiment 2

[0040] 1. Anodized Al 2 o 3 The substrate (Anodisc25, pore size 100nm) is placed on the Si support pad;

[0041] 2. Use paraffin as the sealing material, connect and seal the bottom of the substrate with the backing plate, and only expose Al 2 o 3 Substrate single side;

[0042] 3. By sealing the porous substrate on one side and exposing the other side of the porous substrate, coating the sol on the exposed surface of the porous substrate, the air in the pores of the substrate is compressed to form an air cushion, which prevents the sol liquid from flowing into the hole, thus forming on the surface of the substrate. Homogeneous sol-gel film; where:

[0043] Sol preparation: Dilute 10 g tetraethyl orthosilicate in 30 g ethanol, add 4 g hydrochloric acid aqueous solution (0.1 mol / l), stir at 60° C. for 1 h, until a transparent and clear sol is obtained.

[0044] Coating sol: use the spin coating method, place the backing plate sealed with the porous substrate on the spin co...

Embodiment 3

[0048] 1. Place a track-etched polycarbonate membrane (Whatman Cyclopore) with a pore size of 200 nm on the Si sheet support plate;

[0049] 2. Use silica gel as the sealing material to connect and seal the peripheral edge of the substrate with the backing plate, and only expose the track to etch one side of the organic substrate;

[0050] 3. By sealing the porous substrate on one side and exposing the other side of the porous substrate, coating the sol on the exposed surface of the porous substrate, the air in the pores of the substrate is compressed to form an air cushion, which prevents the sol liquid from flowing into the hole, thus forming on the surface of the substrate. Homogeneous sol-gel film; where:

[0051] Preparation of sol: Dilute 10 g tetraethyl orthosilicate in 40 g ethanol, add 4 g aqueous hydrochloric acid (0.1 mol / l), stir at 60° C. for 1 h, until a transparent and clear sol is obtained.

[0052] Coating sol: adopt the pulling coating method, immerse the ba...

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Abstract

The invention relates to a method for coating sol-gel thin films on the surface of a porous base plate, belonging to the technical field of non-metallic inorganic materials. The method causes that the air in holes of the base plate is compressed to form an air cushion and prevent sol liquid from flowing into the interior of the holes by sealing a single side of the porous base plate, exposing theother side of the porous base plate, and coating sol on the exposed surface of the porous base plate, thus forming the uniform sol-gel thin films on the surface of the base plate. Porous base plates such as a porous silicon base plate, a track etching organic diaphragm plate, an anodic oxidation Al2O3 and the like are all applicable to the method. In the method, organic matter is not used for filling and blocking the holes of the porous base plate; but the liquid sol can be directly coated on the surface of the porous base plate and a uniform inorganic or inorganic / organic membranous layer isguaranteed to be formed on the surface of the porous base plate in a non leakage way by using the method for sealing the single side of the porous base plate, thus solving the problem of the prior art.

Description

technical field [0001] The invention relates to a film preparation method in the technical field of inorganic non-metallic materials, in particular to a method for coating a sol-gel film on the surface of a porous substrate. Background technique [0002] The soft chemical sol-gel method has simple process and low manufacturing cost, so it has become an effective process for preparing inorganic and inorganic / organic composite films. The films prepared by this method can be applied to gas and liquid filtration and fuel cell electrolytes. Sol-gel films must be supported on porous substrates in order to achieve gas-liquid separation and other special functions. As porous support substrates, there are nanoporous glass plates prepared by phase-separation etching, sintered porous ceramic substrates, porous silicon wafers, track-etched organic substrates, and anodized Al substrates. 2 o 3 Porous substrates etc. are optional. The ultra-thin nature of the sol-gel film determines th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D69/10B01D71/02
Inventor 李海滨
Owner SHANGHAI JIAOTONG UNIV