Micro-optical scanning tomography device

Abstract

The invention relates to a three-dimensional micro-optical imaging device and aims to provide an imaging method of micro-optical scanning chromatography. The method comprise that: a large sample is sliced up layer by layer through precise mechanical processing technique; and the slice is scanned and imaged while performing the mechanical processing so as to acquire a complete faultage image data set of the sample. The system comprises a mechanical processing module, an imaging module and a data acquiring module, wherein the mechanical processing module is used for realizing scanning type slicing on the sample; the imaging module is used for imaging the sample near a cutter edge; and the data acquiring module is used for scanning and recording the imaging of the sample. The three modules coordinate to realize the functions of a micro-optical scanning chromatography imaging device. The imaging device adopts a synchronous mode of slicing and imaging, the automation degree of the whole process is extremely high, the problem that pictures between different layers are difficult to match does not exist, and the acquisition efficiency of the whole data is high.

Description

technical field [0001] The present invention relates to an optical micro-imaging technology, more specifically, relates to a three-dimensional optical micro-imaging device combined with precision machining technology and aimed at obtaining continuous tomograms of samples. Background technique [0002] Optical microscope is the most important microscopic imaging technology. It is an optical instrument that uses optical principles to magnify and image tiny objects that cannot be resolved by the human eye, so that people can extract microstructure information. As early as the 1st century BC, people have discovered that when observing tiny objects through spherical transparent objects, they can be enlarged and imaged. In 1590, Dutch and Italian eyeglass makers had created magnifying instruments similar to microscopes. In the middle of the 17th century, both R. Hooke of England and A. van Levin Hooke of the Netherlands made outstanding contributions to the development of microsc...

AI Technical Summary

Problems solved by technology

The first problem is the resolution limit of optical imaging, often called "Abbe limit", for visible light imaging, this value is 200nm

The second problem is the field of view limit at high resolution, that is to say, the more you want to see a small target, the smaller the field of view

The third problem is the imaging depth limit. For high-resolution optical imaging, there is a "soft limit" of 1mm. For example, the penet

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