Preparation of nanocrystalline lead zirconat-titanato-quartz composite structure piezoelectric sensing material

A crystalline lead zirconate titanate and composite structure technology are applied in the fields of biological detection, piezoelectric material lead zirconate titanate, composite structure sensing material, nanocrystalline lead zirconate titanate-quartz composite structure piezoelectric sensing material , which can solve the problems of sensor sensitivity and detection rate limitation, low resonant frequency, reduction and so on

Inactive Publication Date: 2009-07-15
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0004] Research abroad (Silicon / Quartz Bonding and Quartz Deep RIE for the Fabrication of Quartz Resonator structures, NEMS 2008.3rd IEEE) mentioned a method of making quartz cantilever beams, which can be applied to biological detection and can improve the detection rate, but due to The piezoelectric coefficient of quartz crystal is relatively small (d 11 =2.31(PC / N)), its resonant frequency is relatively low when the shape and other conditions are certain, if its frequency is increased by reducing its thickness, it will easily lead to the fragmentation of the quartz piece, and the quartz is fixed in the sensor After the crystal, its frequency will still be reduced, so the sensitivity and detection rate of the sensor are limited
At the same time, its preparation process is also quite complicated

Method used

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  • Preparation of nanocrystalline lead zirconat-titanato-quartz composite structure piezoelectric sensing material
  • Preparation of nanocrystalline lead zirconat-titanato-quartz composite structure piezoelectric sensing material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1. Use lead acetate, tetrabutyl titanate and tetrabutyl zirconate as raw materials, weigh the raw materials according to the molar ratio of Pb:Zr:Ti=1.04:0.5:0.5, and set aside.

[0024] 2. Mix the prepared raw materials tetrabutyl titanate and acetylacetone at a molar ratio of 1:2, stir at 20°C for 1 hour, then add the prepared raw material tetrabutyl zirconate, and continue stirring until the mixture is uniform to obtain zirconium titanium mixture solution.

[0025] 3. Dissolve the prepared lead acetate in ethylene glycol methyl ether at a concentration of 0.2g / ml, stir at 120°C for 30 minutes, cool to 80°C, and then add the previous The homogeneously mixed zirconium-titanium mixture solution was stirred at 80° C. for 30 minutes to obtain a pale yellow PZT precursor sol.

[0026] 4. Perform vacuum distillation and vacuum drying on the precursor sol of lead zirconate titanate to obtain PZT xerogel.

[0027] 5. Dissolving the PZT xerogel in ethylene glycol methyl ethe...

Embodiment 2

[0031] 1. Use lead acetate, tetrabutyl titanate and tetrabutyl zirconate as raw materials, weigh the raw materials according to the molar ratio of Pb:Zr:Ti=1.05:0.5:0.5, and set aside.

[0032] 2. Mix the prepared raw material tetrabutyl titanate and acetylacetone according to the molar ratio of 1:2, stir at 20°C for 1.5 hours, then add the prepared raw material tetrabutyl zirconate, and continue to stir until the mixture is uniform to obtain zirconium titanium mixture solution.

[0033] 3. Dissolve the prepared lead acetate in ethylene glycol methyl ether at a concentration of 0.25g / ml, stir at 120°C for 30 minutes and cool to 80°C, then add the previous The homogeneously mixed zirconium-titanium mixture solution was stirred at 80° C. for 30 minutes to obtain a pale yellow PZT precursor sol.

[0034] 4. Perform vacuum distillation and vacuum drying on the precursor sol of lead zirconate titanate to obtain PZT xerogel.

[0035] 5. Dissolving the PZT xerogel in ethylene glyco...

Embodiment 3

[0039] 1. Use lead acetate, tetrabutyl titanate and tetrabutyl zirconate as raw materials, weigh the raw materials according to the molar ratio of Pb:Zr:Ti=1.06:0.5:0.5, and set aside.

[0040] 2. Mix the prepared raw materials tetrabutyl titanate and acetylacetone at a molar ratio of 1:2, stir at 30°C for 2 hours, then add the prepared raw material tetrabutyl zirconate, and continue stirring until the mixture is uniform to obtain zirconium titanium mixture solution.

[0041] 3. Dissolve the prepared lead acetate in ethylene glycol methyl ether at a concentration of 0.3g / ml, stir at 120°C for 30 minutes, then cool to 80°C, and then add the previous The homogeneously mixed zirconium-titanium mixture solution was stirred at 80° C. for 30 minutes to obtain a pale yellow PZT precursor sol.

[0042] 4. Perform vacuum distillation and vacuum drying on the precursor sol of lead zirconate titanate to obtain PZT xerogel.

[0043] 5. Dissolve the PZT xerogel in ethylene glycol methyl ...

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Abstract

The invention relates to a preparation method of a nanocrystalline lead zirconate titanate-quartz composite structure piezoelectric sensing material. The preparation method comprises the following steps: firstly, preparing lead zirconate titanate (PZT) precursor sol, obtaining dry PZT gel by vacuum distillation, and then dissolving the dry gel into ethylene glycol monomethyl ether and adding mixture of glycerin and glacial acetic acid as drying control chemical reagents, thus preparing the PZT sol; and then spin-coating the PZT sol on surfaces of a quartz substrate and performing heat treatment to obtain a film, repeating spin-coating and heat treatment process to obtain a plurality of layers of films, and then performing crystallization treatment, thus obtaining the nanocrystalline PZT film by compounding the films on the quartz substrate and obtaining the nanocrystalline PZT-quartz composite structure piezoelectric sensing material. The characteristics of good piezoelectric property of the PZT and highly stable frequency of quartz crystals are fully utilized in the preparation method, and the PZT nanocrystalline structure compounded on the quartz substrate has the advantages of good crystallographic direction tendency, compact structure and higher piezoelectric coefficient.

Description

technical field [0001] The invention relates to a preparation method of a piezoelectric sensing material with nanocrystalline lead zirconate titanate-quartz composite structure, in particular to a piezoelectric material lead zirconate titanate (PZT) with good piezoelectric properties compounded on the surface of a quartz crystal. ), so as to obtain a method of composite structure sensing material, which is mainly used in biological detection. The invention belongs to the technical field of functional materials and devices. Background technique [0002] Piezoelectric materials can be used in different fields. It has been applied to scientific research, industrial production, national defense construction and many fields closely related to people's life. Today, with the development of life science and medicine, piezoelectric materials are more and more used in the biological field. Piezoelectric materials have been used in the diagnosis and treatment of diseases. For examp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/48C04B35/14C04B35/622
Inventor 惠春徐爱兰侯安州倪鹤南
Owner SHANGHAI JIAO TONG UNIV
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